Issued Patents All Time
Showing 25 most recent of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12178398 | Electronic assemblies including a conformal moisture barrier | John A. Barton, Jonathan D. Halderman | 2024-12-31 |
| 11700993 | Electronic assemblies including a conformal moisture barrier | John A. Barton, Jonathan D. Halderman | 2023-07-18 |
| 11493841 | Glass ceramic for ultraviolet lithography and method of manufacturing thereof | Ralf Hofmann, Cara Beasley | 2022-11-08 |
| 10788744 | Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor | Ralf Hofmann, Cara Beasley | 2020-09-29 |
| 10763091 | Physical vapor deposition chamber particle reduction apparatus and methods | Vibhu Jindal, Sanjay Bhat | 2020-09-01 |
| 10691013 | Extreme ultraviolet lithography system having chuck assembly and method of manufacturing thereof | — | 2020-06-23 |
| 10551731 | Glass ceramic for ultraviolet lithography and method of manufacturing thereof | Ralf Hofmann, Cara Beasley | 2020-02-04 |
| 10551732 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Cara Beasley, Ralf Hofmann | 2020-02-04 |
| 10522375 | Monitoring system for deposition and method of operation thereof | Edward W. Budiarto, Ralf Hofmann, Thomas Nowak, Todd Egan, Mehdi Vaez-Iravani | 2019-12-31 |
| 10209613 | System and method for manufacturing planarized extreme ultraviolet lithography blank | Cara Beasley, Ralf Hofmann, Timothy Michaelson | 2019-02-19 |
| 10197907 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Cara Beasley, Ralf Hofmann | 2019-02-05 |
| 10012897 | Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Cara Beasley, Ralf Hofmann | 2018-07-03 |
| 10012908 | Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof | Ralf Hofmann, Vinayak Vishwanath Hassan, Cara Beasley | 2018-07-03 |
| 9915621 | Extreme ultraviolet (EUV) substrate inspection system with simplified optics and method of manufacturing thereof | Christopher Dennis Bencher, Christopher G. Talbot, John Christopher Moran | 2018-03-13 |
| 9905418 | Growing graphene on substrates | Cara Beasley, Ralf Hofmann | 2018-02-27 |
| 9870935 | Monitoring system for deposition and method of operation thereof | Edward W. Budiarto, Ralf Hofmann, Thomas Nowak, Todd Egan, Mehdi Vaez-Iravani | 2018-01-16 |
| 9829805 | Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor | Timothy Michaelson, Timothy Weidman, Barry Chin, Paul Deaton | 2017-11-28 |
| 9739913 | Extreme ultraviolet capping layer and method of manufacturing and lithography thereof | Cara Beasley, Ralf Hofmann, Rudy Beckstrom, III | 2017-08-22 |
| 9690016 | Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof | Ralf Hofmann, Cara Beasley, Vinayak Vishwanath Hassan | 2017-06-27 |
| 9685186 | HDD pattern implant system | Jacob Newman, Jose Antonio Marin, Daniel J. Hoffman, Stephen Moffatt, Steven Verhaverbeke | 2017-06-20 |
| 9632411 | Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor | Timothy Michaelson, Timothy Weidman, Barry Chin, Paul Deaton | 2017-04-25 |
| 9612522 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Cara Beasley, Ralf Hofmann | 2017-04-04 |
| 9595436 | Growing graphene on substrates | Cara Beasley, Ralf Hofmann | 2017-03-14 |
| 9581889 | Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Cara Beasley, Ralf Hofmann | 2017-02-28 |
| 9581890 | Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof | Ralf Hofmann, Vinayak Vishwanath Hassan, Cara Beasley | 2017-02-28 |