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Controlling an intensity profile of an energy beam with a deformable mirror in additive manufacturing |
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Extreme ultraviolet (EUV) substrate inspection system with simplified optics and method of manufacturing thereof |
Majeed A. Foad, Christopher Dennis Bencher, John Christopher Moran |
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High current electron beam inspection |
Alexander Kadyshevitch, Dmitry Shur |
2009-10-13 |
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Detection of defects in patterned substrates |
Chiwoei Wayne Lo |
2007-08-07 |
| 6914441 |
Detection of defects in patterned substrates |
Chiwoei Wayne Lo |
2005-07-05 |
| 6539106 |
Feature-based defect detection |
Harry Gallarda, Chiwoei Wayne Lo, Adam Rhoads |
2003-03-25 |
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Through-the-substrate investigation of flip-chip IC's |
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2003-02-11 |
| 6509750 |
Apparatus for detecting defects in patterned substrates |
Chiwoei Wayne Lo |
2003-01-21 |
| 6504393 |
Methods and apparatus for testing semiconductor and integrated circuit structures |
Chiwoei Wayne Lo, Mariel Stoops |
2003-01-07 |
| 6252412 |
Method of detecting defects in patterned substrates |
Chiwoei Wayne Lo |
2001-06-26 |
| 6225626 |
Through-the-substrate investigation of flip chip IC's |
James Henry Brown |
2001-05-01 |
| 6091249 |
Method and apparatus for detecting defects in wafers |
Chiwoei Wayne Lo, Luis Camilo Orjuela, Li Wang |
2000-07-18 |
| 5959458 |
Method and apparatus for measuring electrical waveforms using atomic force microscopy |
— |
1999-09-28 |
| 5821549 |
Through-the-substrate investigation of flip-chip IC's |
James Henry Brown |
1998-10-13 |
| 5675499 |
Optimal probe point placement |
William T. Lee, Ronny Soetarman |
1997-10-07 |
| 5616921 |
Self-masking FIB milling |
Douglas K. Masnaghetti, Hongyu Ximen |
1997-04-01 |
| 5530372 |
Method of probing a net of an IC at an optimal probe-point |
William T. Lee, Ronny Soetarman |
1996-06-25 |
| 5401972 |
Layout overlay for FIB operations |
Douglas K. Masnaghetti |
1995-03-28 |
| 5357116 |
Focused ion beam processing with charge control |
Thomas M. Trexler |
1994-10-18 |
| 5144225 |
Methods and apparatus for acquiring data from intermittently failing circuits |
Neil Richardson |
1992-09-01 |
| 5140164 |
IC modification with focused ion beam system |
Neil Richardson, Douglas K. Masnaghetti |
1992-08-18 |
| 4510384 |
Automatic focusing device with frequency weighted amplification |
James B. Grimbleby |
1985-04-09 |
