Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7262418 | Method and apparatus for multiple charged particle beams | Xinrong Jiang | 2007-08-28 |
| 7253645 | Detection of defects in patterned substrates | Christopher G. Talbot | 2007-08-07 |
| 7067809 | Method and apparatus for multiple charged particle beams | Xinrong Jiang | 2006-06-27 |
| 6914441 | Detection of defects in patterned substrates | Christopher G. Talbot | 2005-07-05 |
| 6566897 | Voltage contrast method and apparatus for semiconductor inspection using low voltage particle beam | Kenichi Kanai | 2003-05-20 |
| 6539106 | Feature-based defect detection | Harry Gallarda, Adam Rhoads, Christopher G. Talbot | 2003-03-25 |
| 6509750 | Apparatus for detecting defects in patterned substrates | Christopher G. Talbot | 2003-01-21 |
| 6504393 | Methods and apparatus for testing semiconductor and integrated circuit structures | Mariel Stoops, Christopher G. Talbot | 2003-01-07 |
| 6344750 | Voltage contrast method for semiconductor inspection using low voltage particle beam | Kenichi Kanai | 2002-02-05 |
| 6252705 | Stage for charged particle microscopy system | Daniel Bui | 2001-06-26 |
| 6252412 | Method of detecting defects in patterned substrates | Christopher G. Talbot | 2001-06-26 |
| 6232787 | Microstructure defect detection | Pierre Perez | 2001-05-15 |
| 6091249 | Method and apparatus for detecting defects in wafers | Christopher G. Talbot, Luis Camilo Orjuela, Li Wang | 2000-07-18 |
| 5920073 | Optical system | William Lo | 1999-07-06 |