Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11639291 | Method for carbon nanotube purification | John Provine, Gregory Michael Pitner | 2023-05-02 |
| 11493841 | Glass ceramic for ultraviolet lithography and method of manufacturing thereof | Ralf Hofmann, Majeed A. Foad | 2022-11-08 |
| 11208328 | Method for carbon nanotube purification | John Provine, Gregory Michael Pitner | 2021-12-28 |
| 10788744 | Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor | Ralf Hofmann, Majeed A. Foad | 2020-09-29 |
| 10633253 | Method for carbon nanotube purification | John Provine, Gregory Michael Pitner | 2020-04-28 |
| 10551732 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Ralf Hofmann | 2020-02-04 |
| 10551731 | Glass ceramic for ultraviolet lithography and method of manufacturing thereof | Ralf Hofmann, Majeed A. Foad | 2020-02-04 |
| 10209613 | System and method for manufacturing planarized extreme ultraviolet lithography blank | Ralf Hofmann, Majeed A. Foad, Timothy Michaelson | 2019-02-19 |
| 10197907 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Ralf Hofmann | 2019-02-05 |
| 10012897 | Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Ralf Hofmann | 2018-07-03 |
| 10012908 | Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof | Ralf Hofmann, Vinayak Vishwanath Hassan, Majeed A. Foad | 2018-07-03 |
| 9905418 | Growing graphene on substrates | Ralf Hofmann, Majeed A. Foad | 2018-02-27 |
| 9739913 | Extreme ultraviolet capping layer and method of manufacturing and lithography thereof | Ralf Hofmann, Majeed A. Foad, Rudy Beckstrom, III | 2017-08-22 |
| 9690016 | Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof | Ralf Hofmann, Vinayak Vishwanath Hassan, Majeed A. Foad | 2017-06-27 |
| 9612522 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Ralf Hofmann | 2017-04-04 |
| 9595436 | Growing graphene on substrates | Ralf Hofmann, Majeed A. Foad | 2017-03-14 |
| 9581890 | Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof | Ralf Hofmann, Vinayak Vishwanath Hassan, Majeed A. Foad | 2017-02-28 |
| 9581889 | Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Ralf Hofmann | 2017-02-28 |
| 9417515 | Ultra-smooth layer ultraviolet lithography mirrors and blanks, and manufacturing and lithography systems therefor | Soumendra N. Barman, Abhijit Basu Mallick, Ralf Hofmann, Nitin K. Ingle | 2016-08-16 |
| 9354508 | Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor | Ralf Hofmann, Majeed A. Foad, Timothy Michaelson | 2016-05-31 |