Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11927543 | Multiple reflectometry for measuring etch parameters | Blake Erickson, Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Michelle SanPedro +1 more | 2024-03-12 |
| 11830779 | In-situ etch material selectivity detection system | Keith R. Berding, Blake Erickson, Zhaozhao Zhu | 2023-11-28 |
| 11619594 | Multiple reflectometry for measuring etch parameters | Blake Erickson, Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Michelle SanPedro +1 more | 2023-04-04 |
| 10727080 | Tantalum-containing material removal | Xikun Wang, Naomi Yoshida, Nitin K. Ingle | 2020-07-28 |
| 9417515 | Ultra-smooth layer ultraviolet lithography mirrors and blanks, and manufacturing and lithography systems therefor | Cara Beasley, Abhijit Basu Mallick, Ralf Hofmann, Nitin K. Ingle | 2016-08-16 |
| 9085458 | Selective nanotube formation and related devices | Zhenan Bao, Melburne C. LeMieux, Justin P. Opatkiewicz | 2015-07-21 |
| 8237155 | Selective nanotube formation and related devices | Zhenan Bao, Melburne C. LeMieux, Justin P. Opatkiewicz | 2012-08-07 |