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Smart camera substrate |
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Spatial optical emission spectroscopy for etch uniformity |
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Substrate measurement subsystem |
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Integrated substrate measurement system to improve manufacturing process performance |
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Smart camera substrate |
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Low open area and coupon endpoint detection |
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Transmission corrected plasma emission using in-situ optical reflectometry |
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Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall |
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| 11927543 |
Multiple reflectometry for measuring etch parameters |
Keith R. Berding, Michael Kutney, Soumendra N. Barman, Zhaozhao Zhu, Michelle SanPedro +1 more |
2024-03-12 |
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In-situ etch material selectivity detection system |
Keith R. Berding, Soumendra N. Barman, Zhaozhao Zhu |
2023-11-28 |
| 11736818 |
Smart camera substrate |
Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Patrick Tae, Devendra Channappa Holeyannavar +4 more |
2023-08-22 |
| 11688616 |
Integrated substrate measurement system to improve manufacturing process performance |
Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu |
2023-06-27 |
| 11668602 |
Spatial optical emission spectroscopy for etch uniformity |
Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Tsung Feng Wu, Michael D. Willwerth +1 more |
2023-06-06 |
| 11619594 |
Multiple reflectometry for measuring etch parameters |
Keith R. Berding, Michael Kutney, Soumendra N. Barman, Zhaozhao Zhu, Michelle SanPedro +1 more |
2023-04-04 |
| D977504 |
Portion of a display panel with a graphical user interface |
Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu |
2023-02-07 |
| 11284018 |
Smart camera substrate |
Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Patrick Tae, Devendra Channappa Holeyannavar +4 more |
2022-03-22 |
| 8568692 |
Method for analyzing collagenous tissues for the detection and diagnosis of bone disease |
Mark Banaszak-Holl, Joseph Wallace, Clifford M. Les, Bradford G. Orr |
2013-10-29 |
