Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12432461 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2025-09-30 |
| 12405164 | Spatial optical emission spectroscopy for etch uniformity | Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Tsung Feng Wu, Michael D. Willwerth +1 more | 2025-09-02 |
| 12283503 | Substrate measurement subsystem | Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu | 2025-04-22 |
| 12191176 | Integrated substrate measurement system to improve manufacturing process performance | Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu | 2025-01-07 |
| 12114083 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2024-10-08 |
| 12080574 | Low open area and coupon endpoint detection | Varoujan Chakarian | 2024-09-03 |
| 12031910 | Transmission corrected plasma emission using in-situ optical reflectometry | Patrick Tae, Zhaozhao Zhu, Chunlei Zhang | 2024-07-09 |
| 12009191 | Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall | Patrick Tae, Zhaozhao Zhu, Michael D. Willwerth, Barry Craver | 2024-06-11 |
| 11927543 | Multiple reflectometry for measuring etch parameters | Keith R. Berding, Michael Kutney, Soumendra N. Barman, Zhaozhao Zhu, Michelle SanPedro +1 more | 2024-03-12 |
| 11830779 | In-situ etch material selectivity detection system | Keith R. Berding, Soumendra N. Barman, Zhaozhao Zhu | 2023-11-28 |
| 11736818 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2023-08-22 |
| 11688616 | Integrated substrate measurement system to improve manufacturing process performance | Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu | 2023-06-27 |
| 11668602 | Spatial optical emission spectroscopy for etch uniformity | Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Tsung Feng Wu, Michael D. Willwerth +1 more | 2023-06-06 |
| 11619594 | Multiple reflectometry for measuring etch parameters | Keith R. Berding, Michael Kutney, Soumendra N. Barman, Zhaozhao Zhu, Michelle SanPedro +1 more | 2023-04-04 |
| D977504 | Portion of a display panel with a graphical user interface | Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu | 2023-02-07 |
| 11284018 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2022-03-22 |
| 8568692 | Method for analyzing collagenous tissues for the detection and diagnosis of bone disease | Mark Banaszak-Holl, Joseph Wallace, Clifford M. Les, Bradford G. Orr | 2013-10-29 |