| 12489022 |
In-situ etch rate and etch rate uniformity detection system |
Keith R. Berding, Soumendra N. Barman, Zhen Zhu |
2025-12-02 |
|
| 12469686 |
Process characterization and correction using optical wall process sensor (OWPS) |
Jeffrey Yat Shan Au, Joshua Maher, Varoujan Chakarian, Sidharth Bhatia, Patrick Tae +1 more |
2025-11-11 |
|
| 12442765 |
Transmission corrected plasma emission using in-situ optical reflectometry |
Patrick Tae, Zhen Zhu, Chengxu Zhang |
2025-10-14 |
|
| 12432461 |
Smart camera substrate |
Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Patrick Tae, Devendra Channappa Holeyannavar +4 more |
2025-09-30 |
|
| 12405164 |
Spatial optical emission spectroscopy for etch uniformity |
Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Tsung Feng Wu, Michael D. Willwerth +1 more |
2025-09-02 |
|
| 12283503 |
Substrate measurement subsystem |
Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu |
2025-04-22 |
|
| 12191176 |
Integrated substrate measurement system to improve manufacturing process performance |
Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu |
2025-01-07 |
|
| 12114083 |
Smart camera substrate |
Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Patrick Tae, Devendra Channappa Holeyannavar +4 more |
2024-10-08 |
$69,128,000 |
| 12080574 |
Low open area and coupon endpoint detection |
Varoujan Chakarian |
2024-09-03 |
$44,731,000 |
| 12031910 |
Transmission corrected plasma emission using in-situ optical reflectometry |
Patrick Tae, Zhaozhao Zhu, Chunlei Zhang |
2024-07-09 |
$62,454,000 |
| 12009191 |
Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall |
Patrick Tae, Zhaozhao Zhu, Michael D. Willwerth, Barry Craver |
2024-06-11 |
$84,570,000 |
| 11927543 |
Multiple reflectometry for measuring etch parameters |
Keith R. Berding, Michael Kutney, Soumendra N. Barman, Zhaozhao Zhu, Michelle SanPedro +1 more |
2024-03-12 |
$97,620,000 |
| 11830779 |
In-situ etch material selectivity detection system |
Keith R. Berding, Soumendra N. Barman, Zhaozhao Zhu |
2023-11-28 |
$39,424,000 |
| 11736818 |
Smart camera substrate |
Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Patrick Tae, Devendra Channappa Holeyannavar +4 more |
2023-08-22 |
$40,609,000 |
| 11688616 |
Integrated substrate measurement system to improve manufacturing process performance |
Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu |
2023-06-27 |
$59,089,000 |
| 11668602 |
Spatial optical emission spectroscopy for etch uniformity |
Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Tsung Feng Wu, Michael D. Willwerth +1 more |
2023-06-06 |
$40,761,000 |
| 11619594 |
Multiple reflectometry for measuring etch parameters |
Keith R. Berding, Michael Kutney, Soumendra N. Barman, Zhaozhao Zhu, Michelle SanPedro +1 more |
2023-04-04 |
$41,324,000 |
| D977504 |
Portion of a display panel with a graphical user interface |
Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu |
2023-02-07 |
|
| 11284018 |
Smart camera substrate |
Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Patrick Tae, Devendra Channappa Holeyannavar +4 more |
2022-03-22 |
$64,102,000 |
| 8568692 |
Method for analyzing collagenous tissues for the detection and diagnosis of bone disease |
Mark Banaszak-Holl, Joseph Wallace, Clifford M. Les, Bradford G. Orr |
2013-10-29 |
|
