Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405164 | Spatial optical emission spectroscopy for etch uniformity | Blake Erickson, Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Michael D. Willwerth +1 more | 2025-09-02 |
| 11668602 | Spatial optical emission spectroscopy for etch uniformity | Blake Erickson, Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Michael D. Willwerth +1 more | 2023-06-06 |
| 10816550 | Systems, apparatus, and methods for sorting particles | Sung-Hwan Cho, Jose Morachis, Yuhwa Lo, Ian Quigley, Kendall Chuang +2 more | 2020-10-27 |
| 9074978 | Optical space-time coding technique in microfluidic devices | Yu-Hwa Lo, Zhe Mei | 2015-07-07 |