| 12405164 |
Spatial optical emission spectroscopy for etch uniformity |
Blake Erickson, Keith R. Berding, Michael Kutney, Tsung Feng Wu, Michael D. Willwerth +1 more |
2025-09-02 |
|
| 12339645 |
Estimation of chamber component conditions using substrate measurements |
Chunlei Zhang, Michael Kutney |
2025-06-24 |
|
| 12283503 |
Substrate measurement subsystem |
Upendra Ummethala, Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel |
2025-04-22 |
|
| 12216455 |
Chamber component condition estimation using substrate measurements |
Chunlei Zhang, Michael Kutney |
2025-02-04 |
|
| 12191176 |
Integrated substrate measurement system to improve manufacturing process performance |
Upendra Ummethala, Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel |
2025-01-07 |
|
| 12148647 |
Integrated substrate measurement system |
Patricia A. Schulze, Gregory John Freeman, Michael Kutney, Arunkumar Ramachandraiah, Chih Chung Chou +1 more |
2024-11-19 |
$80,955,000 |
| D1045924 |
Portion of a display panel with a graphical user interface |
Sidharth Bhatia, Jeffrey Yat Shan Au, Shawn Levesque, Michael David Howells, Raja Sekhar Jetti |
2024-10-08 |
|
| D1045923 |
Portion of a display panel with a graphical user interface |
Sidharth Bhatia, Jeffrey Yat Shan Au, Shawn Levesque, Michael David Howells, Raja Sekhar Jetti |
2024-10-08 |
|
| 12031910 |
Transmission corrected plasma emission using in-situ optical reflectometry |
Patrick Tae, Blake Erickson, Chunlei Zhang |
2024-07-09 |
$62,454,000 |
| D1031743 |
Portion of a display panel with a graphical user interface |
Sidharth Bhatia, Jeffrey Yat Shan Au, Shawn Levesque, Michael David Howells, Raja Sekhar Jetti |
2024-06-18 |
|
| 12009191 |
Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall |
Patrick Tae, Blake Erickson, Michael D. Willwerth, Barry Craver |
2024-06-11 |
$84,570,000 |
| 11927543 |
Multiple reflectometry for measuring etch parameters |
Blake Erickson, Keith R. Berding, Michael Kutney, Soumendra N. Barman, Michelle SanPedro +1 more |
2024-03-12 |
$97,620,000 |
| 11830779 |
In-situ etch material selectivity detection system |
Keith R. Berding, Blake Erickson, Soumendra N. Barman |
2023-11-28 |
$39,424,000 |
| 11688616 |
Integrated substrate measurement system to improve manufacturing process performance |
Upendra Ummethala, Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel |
2023-06-27 |
$59,089,000 |
| 11668602 |
Spatial optical emission spectroscopy for etch uniformity |
Blake Erickson, Keith R. Berding, Michael Kutney, Tsung Feng Wu, Michael D. Willwerth +1 more |
2023-06-06 |
$40,761,000 |
| 11619594 |
Multiple reflectometry for measuring etch parameters |
Blake Erickson, Keith R. Berding, Michael Kutney, Soumendra N. Barman, Michelle SanPedro +1 more |
2023-04-04 |
$41,324,000 |
| D977504 |
Portion of a display panel with a graphical user interface |
Upendra Ummethala, Blake Erickson, Prashanth Kumar, Michael Kutney, Steven Trey Tindel |
2023-02-07 |
|
