Multiple reflectometry for measuring etch parameters

Assignee

• Applied Materials

Inventors

• Blake Erickson (20 patents)
• Keith R. Berding (41 patents)
• Michael Kutney (30 patents)
• Soumendra N. Barman (8 patents)
• Zhaozhao Zhu (17 patents)
• Michelle SanPedro (3 patents)
• Suresh Polali Narayana Rao (2 patents)

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