| 12405164 |
Spatial optical emission spectroscopy for etch uniformity |
Blake Erickson, Keith R. Berding, Zhaozhao Zhu, Tsung Feng Wu, Michael D. Willwerth +1 more |
2025-09-02 |
|
| 12339645 |
Estimation of chamber component conditions using substrate measurements |
Chunlei Zhang, Zhaozhao Zhu |
2025-06-24 |
|
| 12283503 |
Substrate measurement subsystem |
Upendra Ummethala, Blake Erickson, Prashanth Kumar, Steven Trey Tindel, Zhaozhao Zhu |
2025-04-22 |
|
| 12216455 |
Chamber component condition estimation using substrate measurements |
Chunlei Zhang, Zhaozhao Zhu |
2025-02-04 |
|
| 12191176 |
Integrated substrate measurement system to improve manufacturing process performance |
Upendra Ummethala, Blake Erickson, Prashanth Kumar, Steven Trey Tindel, Zhaozhao Zhu |
2025-01-07 |
|
| 12148647 |
Integrated substrate measurement system |
Patricia A. Schulze, Gregory John Freeman, Arunkumar Ramachandraiah, Chih Chung Chou, Zhaozhao Zhu +1 more |
2024-11-19 |
$80,955,000 |
| 12066639 |
Adjustable achromatic collimator assembly for endpoint detection systems |
Pengyu Han, John Anthony O'MALLEY, III, Michael N. Grimbergen, Lei Lian, Upendra Ummethala |
2024-08-20 |
$94,413,000 |
| 11927543 |
Multiple reflectometry for measuring etch parameters |
Blake Erickson, Keith R. Berding, Soumendra N. Barman, Zhaozhao Zhu, Michelle SanPedro +1 more |
2024-03-12 |
$97,620,000 |
| 11719952 |
Adjustable achromatic collimator assembly for endpoint detection systems |
Pengyu Han, John Anthony O'MALLEY, III, Michael N. Grimbergen, Lei Lian, Upendra Ummethala |
2023-08-08 |
$46,911,000 |
| 11688616 |
Integrated substrate measurement system to improve manufacturing process performance |
Upendra Ummethala, Blake Erickson, Prashanth Kumar, Steven Trey Tindel, Zhaozhao Zhu |
2023-06-27 |
$59,089,000 |
| 11668602 |
Spatial optical emission spectroscopy for etch uniformity |
Blake Erickson, Keith R. Berding, Zhaozhao Zhu, Tsung Feng Wu, Michael D. Willwerth +1 more |
2023-06-06 |
$40,761,000 |
| 11619594 |
Multiple reflectometry for measuring etch parameters |
Blake Erickson, Keith R. Berding, Soumendra N. Barman, Zhaozhao Zhu, Michelle SanPedro +1 more |
2023-04-04 |
$41,324,000 |
| D977504 |
Portion of a display panel with a graphical user interface |
Upendra Ummethala, Blake Erickson, Prashanth Kumar, Steven Trey Tindel, Zhaozhao Zhu |
2023-02-07 |
|
| 11289387 |
Methods and apparatus for backside via reveal processing |
Prayudi Lianto, Sik Hin Chi, SHIH-CHAO HUNG, Pin Gian Gan, Ricardo Fujii Vinluan +10 more |
2022-03-29 |
$46,373,000 |
| 11150120 |
Low temperature thermal flow ratio controller |
Ashley M. Okada |
2021-10-19 |
$109,516,000 |
| 11054184 |
Methods and apparatus for processing a substrate to remove moisture and/or residue |
— |
2021-07-06 |
$60,527,000 |
| 10247473 |
Methods and apparatus for processing a substrate to remove moisture and/or residue |
— |
2019-04-02 |
$31,503,000 |
| 9982786 |
Valve with adjustable hard stop |
— |
2018-05-29 |
$37,048,000 |
| 9685655 |
Complex showerhead coating apparatus with electrospray for lithium ion battery |
Fei Wang, Hooman Bolandi, Connie P. Wang, Victor Pebenito, Siqing Lu +2 more |
2017-06-20 |
$22,588,000 |
| 8617351 |
Plasma reactor with minimal D.C. coils for cusp, solenoid and mirror fields for plasma uniformity and device damage reduction |
Daniel J. Hoffman, Roger Alan Lindley, Martin Jeff Salinas, Hamid Tavassoli, Keiji Horioka +1 more |
2013-12-31 |
$7,926,000 |
| 8440019 |
Lower liner with integrated flow equalizer and improved conductance |
James D. Carducci, Andrew Nguyen, Ajit Balakrishna |
2013-05-14 |
$11,782,000 |
| 8382939 |
Plasma processing chamber with enhanced gas delivery |
Roger Alan Lindley |
2013-02-26 |
$7,365,000 |
| 8313578 |
Etching chamber having flow equalizer and lower liner |
James D. Carducci, Kin Pong Lo, Kallol Bera, Matthew L. Miller |
2012-11-20 |
$4,897,000 |
| 8282736 |
Lower liner with integrated flow equalizer and improved conductance |
James D. Carducci, Andrew Nguyen, Ajit Balakrishna |
2012-10-09 |
$6,230,000 |
| 8118938 |
Lower liner with integrated flow equalizer and improved conductance |
James D. Carducci, Andrew Nguyen, Ajit Balakrishna |
2012-02-21 |
$13,903,000 |
