| 12505980 |
Apparatus to produce a waveform |
Daniel Carter, Randy Heckman, Victor Brouk |
2025-12-23 |
|
| 12354836 |
System, method, and apparatus for controlling ion energy distribution in plasma processing systems |
Victor Brouk, Daniel Carter |
2025-07-08 |
|
| 12154759 |
Apparatus to control a waveform |
Daniel Carter, Victor Brouk |
2024-11-26 |
$27,155,000 |
| 12142452 |
Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system |
Daniel Carter, Victor Brouk |
2024-11-12 |
$13,619,000 |
| 11978611 |
Apparatus with switches to produce a waveform |
Daniel Carter, Randy Heckman, Victor Brouk |
2024-05-07 |
$8,569,000 |
| 11615941 |
System, method, and apparatus for controlling ion energy distribution in plasma processing systems |
Victor Brouk, Daniel Carter |
2023-03-28 |
$11,166,000 |
| 11189454 |
Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system |
Daniel Carter, Victor Brouk |
2021-11-30 |
|
| 11011349 |
System, method, and apparatus for controlling ion energy distribution in plasma processing systems |
Victor Brouk, Daniel Carter |
2021-05-18 |
|
| 10648074 |
Physical vapor deposition with isotropic neutral and non-isotropic ion velocity distribution at the wafer surface |
Karl M. Brown, Ying Rui, John Pipitone |
2020-05-12 |
$50,210,000 |
| 10400328 |
Physical vapor deposition system with a source of isotropic ion velocity distribution at the wafer surface |
Karl M. Brown, Ying Rui, John Pipitone |
2019-09-03 |
$20,988,000 |
| 10225919 |
Projected plasma source |
Daniel Carter, Karen Peterson, Randy Grilley |
2019-03-05 |
|
| 10224186 |
Plasma source device and methods |
Scott Polak, Daniel Carter, Karen Peterson, Randy Grilly, Mike Thornton |
2019-03-05 |
|
| 10012248 |
Annular baffle |
Kallol Bera |
2018-07-03 |
$29,604,000 |
| 9856558 |
Physical vapor deposition method with a source of isotropic ion velocity distribution at the wafer surface |
Karl M. Brown, Ying Rui, John Pipitone |
2018-01-02 |
$37,336,000 |
| 9767988 |
Method of controlling the switched mode ion energy distribution system |
Victor Brouk, Daniel Carter |
2017-09-19 |
$16,927,000 |
| 9685186 |
HDD pattern implant system |
Majeed A. Foad, Jacob Newman, Jose Antonio Marin, Stephen Moffatt, Steven Verhaverbeke |
2017-06-20 |
$22,588,000 |
| 9685297 |
Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system |
Daniel Carter, Victor Brouk |
2017-06-20 |
$14,405,000 |
| 9593411 |
Physical vapor deposition chamber with capacitive tuning at wafer support |
Karl M. Brown, Ying Rui, John Pipitone |
2017-03-14 |
$16,778,000 |
| 9589767 |
Systems, methods, and apparatus for minimizing cross coupled wafer surface potentials |
Victor Brouk |
2017-03-07 |
$14,230,000 |
| 9524854 |
Electrostatic remote plasma source system and method |
Daniel Carter, Victor Brouk, Karen Peterson, Randy Grilley |
2016-12-20 |
$13,638,000 |
| 9435029 |
Wafer chucking system for advanced plasma ion energy processing systems |
Victor Brouk |
2016-09-06 |
$10,382,000 |
| 9362089 |
Method of controlling the switched mode ion energy distribution system |
Victor Brouk, Daniel Carter |
2016-06-07 |
$9,806,000 |
| 9309594 |
System, method and apparatus for controlling ion energy distribution of a projected plasma |
Victor Brouk, Daniel Carter |
2016-04-12 |
$4,103,000 |
| 9287086 |
System, method and apparatus for controlling ion energy distribution |
Victor Brouk, Randy Heckman |
2016-03-15 |
$1,991,000 |
| 9208992 |
Method for controlling ion energy distribution |
Victor Brouk, Randy Heckman |
2015-12-08 |
$3,817,000 |
