Issued Patents All Time
Showing 25 most recent of 116 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354836 | System, method, and apparatus for controlling ion energy distribution in plasma processing systems | Victor Brouk, Daniel Carter | 2025-07-08 |
| 12154759 | Apparatus to control a waveform | Daniel Carter, Victor Brouk | 2024-11-26 |
| 12142452 | Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system | Daniel Carter, Victor Brouk | 2024-11-12 |
| 11978611 | Apparatus with switches to produce a waveform | Daniel Carter, Randy Heckman, Victor Brouk | 2024-05-07 |
| 11615941 | System, method, and apparatus for controlling ion energy distribution in plasma processing systems | Victor Brouk, Daniel Carter | 2023-03-28 |
| 11189454 | Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system | Daniel Carter, Victor Brouk | 2021-11-30 |
| 11011349 | System, method, and apparatus for controlling ion energy distribution in plasma processing systems | Victor Brouk, Daniel Carter | 2021-05-18 |
| 10648074 | Physical vapor deposition with isotropic neutral and non-isotropic ion velocity distribution at the wafer surface | Karl M. Brown, Ying Rui, John Pipitone | 2020-05-12 |
| 10400328 | Physical vapor deposition system with a source of isotropic ion velocity distribution at the wafer surface | Karl M. Brown, Ying Rui, John Pipitone | 2019-09-03 |
| 10225919 | Projected plasma source | Daniel Carter, Karen Peterson, Randy Grilley | 2019-03-05 |
| 10224186 | Plasma source device and methods | Scott Polak, Daniel Carter, Karen Peterson, Randy Grilly, Mike Thornton | 2019-03-05 |
| 10012248 | Annular baffle | Kallol Bera | 2018-07-03 |
| 9856558 | Physical vapor deposition method with a source of isotropic ion velocity distribution at the wafer surface | Karl M. Brown, Ying Rui, John Pipitone | 2018-01-02 |
| 9767988 | Method of controlling the switched mode ion energy distribution system | Victor Brouk, Daniel Carter | 2017-09-19 |
| 9685186 | HDD pattern implant system | Majeed A. Foad, Jacob Newman, Jose Antonio Marin, Stephen Moffatt, Steven Verhaverbeke | 2017-06-20 |
| 9685297 | Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system | Daniel Carter, Victor Brouk | 2017-06-20 |
| 9593411 | Physical vapor deposition chamber with capacitive tuning at wafer support | Karl M. Brown, Ying Rui, John Pipitone | 2017-03-14 |
| 9589767 | Systems, methods, and apparatus for minimizing cross coupled wafer surface potentials | Victor Brouk | 2017-03-07 |
| 9524854 | Electrostatic remote plasma source system and method | Daniel Carter, Victor Brouk, Karen Peterson, Randy Grilley | 2016-12-20 |
| 9435029 | Wafer chucking system for advanced plasma ion energy processing systems | Victor Brouk | 2016-09-06 |
| 9362089 | Method of controlling the switched mode ion energy distribution system | Victor Brouk, Daniel Carter | 2016-06-07 |
| 9309594 | System, method and apparatus for controlling ion energy distribution of a projected plasma | Victor Brouk, Daniel Carter | 2016-04-12 |
| 9287086 | System, method and apparatus for controlling ion energy distribution | Victor Brouk, Randy Heckman | 2016-03-15 |
| 9208992 | Method for controlling ion energy distribution | Victor Brouk, Randy Heckman | 2015-12-08 |
| 9210790 | Systems and methods for calibrating a switched mode ion energy distribution system | Daniel Carter, Victor Brouk, William J. Hattel | 2015-12-08 |