| 12505980 |
Apparatus to produce a waveform |
Daniel Carter, Randy Heckman, Daniel J. Hoffman |
2025-12-23 |
|
| 12354836 |
System, method, and apparatus for controlling ion energy distribution in plasma processing systems |
Daniel J. Hoffman, Daniel Carter |
2025-07-08 |
|
| 12255048 |
Apparatus to control ion energy |
Randy Heckman |
2025-03-18 |
|
| 12159767 |
Spatial control of plasma processing environments |
Daniel Carter, Kevin Fairbairn, Denis Shaw |
2024-12-03 |
$8,973,000 |
| 12154759 |
Apparatus to control a waveform |
Daniel Carter, Daniel J. Hoffman |
2024-11-26 |
$27,155,000 |
| 12142452 |
Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system |
Daniel Carter, Daniel J. Hoffman |
2024-11-12 |
$13,619,000 |
| 11978611 |
Apparatus with switches to produce a waveform |
Daniel Carter, Randy Heckman, Daniel J. Hoffman |
2024-05-07 |
$8,569,000 |
| 11615941 |
System, method, and apparatus for controlling ion energy distribution in plasma processing systems |
Daniel J. Hoffman, Daniel Carter |
2023-03-28 |
$11,166,000 |
| 11437221 |
Spatial monitoring and control of plasma processing environments |
Daniel Carter, Kevin Fairbairn, Denis Shaw |
2022-09-06 |
$22,224,000 |
| 11189454 |
Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system |
Daniel Carter, Daniel J. Hoffman |
2021-11-30 |
|
| 11011349 |
System, method, and apparatus for controlling ion energy distribution in plasma processing systems |
Daniel J. Hoffman, Daniel Carter |
2021-05-18 |
|
| 10269540 |
Impedance matching system and method of operating the same |
Daniel Carter |
2019-04-23 |
$17,178,000 |
| 9767988 |
Method of controlling the switched mode ion energy distribution system |
Daniel J. Hoffman, Daniel Carter |
2017-09-19 |
$16,927,000 |
| 9685297 |
Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system |
Daniel Carter, Daniel J. Hoffman |
2017-06-20 |
$14,405,000 |
| 9589767 |
Systems, methods, and apparatus for minimizing cross coupled wafer surface potentials |
Daniel J. Hoffman |
2017-03-07 |
$14,230,000 |
| 9524854 |
Electrostatic remote plasma source system and method |
Daniel J. Hoffman, Daniel Carter, Karen Peterson, Randy Grilley |
2016-12-20 |
$13,638,000 |
| 9435029 |
Wafer chucking system for advanced plasma ion energy processing systems |
Daniel J. Hoffman |
2016-09-06 |
$10,382,000 |
| 9362089 |
Method of controlling the switched mode ion energy distribution system |
Daniel J. Hoffman, Daniel Carter |
2016-06-07 |
$9,806,000 |
| 9309594 |
System, method and apparatus for controlling ion energy distribution of a projected plasma |
Daniel J. Hoffman, Daniel Carter |
2016-04-12 |
$4,103,000 |
| 9287092 |
Method and apparatus for controlling ion energy distribution |
Randy Heckman |
2016-03-15 |
$1,991,000 |
| 9287086 |
System, method and apparatus for controlling ion energy distribution |
Randy Heckman, Daniel J. Hoffman |
2016-03-15 |
$1,991,000 |
| 9208992 |
Method for controlling ion energy distribution |
Randy Heckman, Daniel J. Hoffman |
2015-12-08 |
$3,817,000 |
| 9210790 |
Systems and methods for calibrating a switched mode ion energy distribution system |
Daniel J. Hoffman, Daniel Carter, William J. Hattel |
2015-12-08 |
$3,817,000 |
| 9142388 |
Capacitively coupled remote plasma source |
Daniel J. Hoffman, Daniel Carter, Karen Peterson, Randy Grilley |
2015-09-22 |
$3,562,000 |
| 9105447 |
Wide dynamic range ion energy bias control; fast ion energy switching; ion energy control and a pulsed bias supply; and a virtual front panel |
Daniel J. Hoffman, Daniel Carter, Dmitri Kovalevskii |
2015-08-11 |
$7,258,000 |