Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354836 | System, method, and apparatus for controlling ion energy distribution in plasma processing systems | Daniel J. Hoffman, Daniel Carter | 2025-07-08 |
| 12255048 | Apparatus to control ion energy | Randy Heckman | 2025-03-18 |
| 12159767 | Spatial control of plasma processing environments | Daniel Carter, Kevin Fairbairn, Denis Shaw | 2024-12-03 |
| 12154759 | Apparatus to control a waveform | Daniel Carter, Daniel J. Hoffman | 2024-11-26 |
| 12142452 | Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system | Daniel Carter, Daniel J. Hoffman | 2024-11-12 |
| 11978611 | Apparatus with switches to produce a waveform | Daniel Carter, Randy Heckman, Daniel J. Hoffman | 2024-05-07 |
| 11615941 | System, method, and apparatus for controlling ion energy distribution in plasma processing systems | Daniel J. Hoffman, Daniel Carter | 2023-03-28 |
| 11437221 | Spatial monitoring and control of plasma processing environments | Daniel Carter, Kevin Fairbairn, Denis Shaw | 2022-09-06 |
| 11189454 | Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system | Daniel Carter, Daniel J. Hoffman | 2021-11-30 |
| 11011349 | System, method, and apparatus for controlling ion energy distribution in plasma processing systems | Daniel J. Hoffman, Daniel Carter | 2021-05-18 |
| 10269540 | Impedance matching system and method of operating the same | Daniel Carter | 2019-04-23 |
| 9767988 | Method of controlling the switched mode ion energy distribution system | Daniel J. Hoffman, Daniel Carter | 2017-09-19 |
| 9685297 | Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system | Daniel Carter, Daniel J. Hoffman | 2017-06-20 |
| 9589767 | Systems, methods, and apparatus for minimizing cross coupled wafer surface potentials | Daniel J. Hoffman | 2017-03-07 |
| 9524854 | Electrostatic remote plasma source system and method | Daniel J. Hoffman, Daniel Carter, Karen Peterson, Randy Grilley | 2016-12-20 |
| 9435029 | Wafer chucking system for advanced plasma ion energy processing systems | Daniel J. Hoffman | 2016-09-06 |
| 9362089 | Method of controlling the switched mode ion energy distribution system | Daniel J. Hoffman, Daniel Carter | 2016-06-07 |
| 9309594 | System, method and apparatus for controlling ion energy distribution of a projected plasma | Daniel J. Hoffman, Daniel Carter | 2016-04-12 |
| 9287092 | Method and apparatus for controlling ion energy distribution | Randy Heckman | 2016-03-15 |
| 9287086 | System, method and apparatus for controlling ion energy distribution | Randy Heckman, Daniel J. Hoffman | 2016-03-15 |
| 9208992 | Method for controlling ion energy distribution | Randy Heckman, Daniel J. Hoffman | 2015-12-08 |
| 9210790 | Systems and methods for calibrating a switched mode ion energy distribution system | Daniel J. Hoffman, Daniel Carter, William J. Hattel | 2015-12-08 |
| 9142388 | Capacitively coupled remote plasma source | Daniel J. Hoffman, Daniel Carter, Karen Peterson, Randy Grilley | 2015-09-22 |
| 9105447 | Wide dynamic range ion energy bias control; fast ion energy switching; ion energy control and a pulsed bias supply; and a virtual front panel | Daniel J. Hoffman, Daniel Carter, Dmitri Kovalevskii | 2015-08-11 |
| 8742669 | Passive power distribution for multiple electrode inductive plasma source | Daniel Carter | 2014-06-03 |