Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8723423 | Electrostatic remote plasma source | Daniel J. Hoffman, Daniel Carter, Karen Peterson, Randy Grilley | 2014-05-13 |
| 8674606 | Detecting and preventing instabilities in plasma processes | Daniel Carter, Jeff Roberg | 2014-03-18 |
| 8319436 | Passive power distribution for multiple electrode inductive plasma source | Daniel Carter | 2012-11-27 |
| 7822565 | System, method, and apparatus for monitoring characteristics of RF power | Jeff Roberg | 2010-10-26 |
| 7157857 | Stabilizing plasma and generator interactions | Randy Heckman | 2007-01-02 |