Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176184 | Synchronization of bias supplies | Gideon Van Zyl, Kevin Fairbairn | 2024-12-24 |
| 12159767 | Spatial control of plasma processing environments | Daniel Carter, Kevin Fairbairn, Victor Brouk | 2024-12-03 |
| 12142460 | Control of plasma sheath with bias supplies | Kevin Fairbairn, Daniel Carter | 2024-11-12 |
| 12009181 | Match efficiency-variation compensation | Holger Philipp Kley, Suryan Emani | 2024-06-11 |
| 11842884 | Spatial monitoring and control of plasma processing environments | Kevin Fairbairn, Daniel Carter | 2023-12-12 |
| 11610761 | Synchronization between an excitation source and a substrate bias supply | Kevin Fairbairn, Daniel Carter | 2023-03-21 |
| 11437221 | Spatial monitoring and control of plasma processing environments | Daniel Carter, Kevin Fairbairn, Victor Brouk | 2022-09-06 |
| 11282677 | Spatial monitoring and control of plasma processing environments | Kevin Fairbairn, Daniel Carter | 2022-03-22 |
| 11264209 | Application of modulating supplies in a plasma processing system | Gideon Van Zyl, Kevin Fairbairn | 2022-03-01 |
| 10896807 | Synchronization between an excitation source and a substrate bias supply | Kevin Fairbairn, Daniel Carter | 2021-01-19 |
| 10811228 | Control of plasma processing systems that include plasma modulating supplies | Gideon Van Zyl, Kevin Fairbairn | 2020-10-20 |
| 10811229 | Synchronization with a bias supply in a plasma processing system | Gideon Van Zyl, Kevin Fairbairn | 2020-10-20 |
| 10811227 | Application of modulating supplies in a plasma processing system | Gideon Van Zyl, Kevin Fairbairn | 2020-10-20 |
| 10707055 | Spatial and temporal control of ion bias voltage for plasma processing | Kevin Fairbairn, Daniel Carter | 2020-07-07 |
| 10607813 | Synchronized pulsing of plasma processing source and substrate bias | Kevin Fairbairn, Daniel Carter | 2020-03-31 |
| 10026595 | Apparatus for frequency tuning in a RF generator | Myeong Yeol Choi, Mike Mueller, Jeffrey Roberg, Steve Jordan | 2018-07-17 |
| 9748076 | Apparatus for frequency tuning in a RF generator | Myeong Yeol Choi, Mike Mueller, Jeffrey Roberg, Steve Jordan | 2017-08-29 |
| 7942112 | Method and apparatus for preventing the formation of a plasma-inhibiting substance | Fernando Gustavo Tomasel, Justin Mauck, Andrew Shabalin, Juan Jose Gonzalez | 2011-05-17 |
| 6911789 | Power supply for a hot-filament cathode | Steven J. Geissler, James R. Kahn, Harold R. Kaufman | 2005-06-28 |
| 6812648 | Method of cleaning ion source, and corresponding apparatus/system | Henry Luten, Vijayen S. Veerasamy, Maximo Frati | 2004-11-02 |