| 10068739 |
End-hall ion source with enhanced radiation cooling |
James R. Kahn, Richard E. Nethery |
2018-09-04 |
|
| 8994258 |
End-hall ion source with enhanced radiation cooling |
James R. Kahn, Richard E. Nethery |
2015-03-31 |
|
| 8698401 |
Mitigation of plasma-inductor termination |
James R. Kahn |
2014-04-15 |
|
| 7843138 |
Power supply for a hot-filament cathode |
Steven J. Geissler, James R. Kahn |
2010-11-30 |
|
| 7728498 |
Industrial hollow cathode |
Chris M. Shonka, James R. Kahn |
2010-06-01 |
|
| 7667379 |
Industrial hollow cathode with radiation shield structure |
James R. Kahn |
2010-02-23 |
|
| 6911789 |
Power supply for a hot-filament cathode |
Steven J. Geissler, James R. Kahn, Denis Shaw |
2005-06-28 |
$3,024,000 |
| 6870164 |
Pulsed operation of hall-current ion sources |
David A. Baldwin, Boris Ciorneiu |
2005-03-22 |
$4,319,000 |
| 6864485 |
Ion optics with shallow dished grids |
James R. Kahn, Cheryl Phillips |
2005-03-08 |
|
| 6843891 |
Apparatus for sputter deposition |
James R. Kahn, Viacheslav V. Zhurin, David A. Baldwin, Todd Hylton |
2005-01-18 |
$5,450,000 |
| 6750600 |
Hall-current ion source |
James R. Kahn, Raymond S. Robinson, Viacheslav V. Zhurin |
2004-06-15 |
|
| 6724160 |
Ion-source neutralization with a hot-filament cathode-neutralizer |
James R. Kahn, Viacheslav V. Zhurin |
2004-04-20 |
|
| 6682634 |
Apparatus for sputter deposition |
James R. Kahn, Viacheslav V. Zhurin, David A. Baldwin, Todd Hylton |
2004-01-27 |
$8,192,000 |
| 6608431 |
Modular gridless ion source |
— |
2003-08-19 |
|
| 6454910 |
Ion-assisted magnetron deposition |
Viacheslav V. Zhurin, James R. Kahn, Kirk A. Thompson |
2002-09-24 |
|
| 6456011 |
Magnetic field for small closed-drift ion source |
Antonina Ivanovna Bugrova, Aleksei Vasilievich Desiatskov, Aleksei Ivanovich Morozov, Vadim Konstantinovich Kharchevnikov, Viacheslav V. Zhurin |
2002-09-24 |
|
| 6323586 |
Closed drift hollow cathode |
Viacheslav V. Zhurin, James R. Kahn |
2001-11-27 |
|
| 6246162 |
Ion optics |
James R. Kahn, Raymond S. Robinson |
2001-06-12 |
|
| 5793195 |
Angular distribution probe |
Raymond S. Robinson, James R. Kahn |
1998-08-11 |
|
| 5763989 |
Closed drift ion source with improved magnetic field |
— |
1998-06-09 |
|
| 5274306 |
Capacitively coupled radiofrequency plasma source |
Raymond S. Robinson |
1993-12-28 |
|
| 5154635 |
Coaxial vacuum cable |
Raymond S. Robinson |
1992-10-13 |
|
| 4954751 |
Radio frequency hollow cathode |
Raymond S. Robinson |
1990-09-04 |
|
| 4873467 |
Ion source with particular grid assembly |
Raymond S. Robinson |
1989-10-10 |
|
| 4862032 |
End-Hall ion source |
Raymond S. Robinson |
1989-08-29 |
|
