Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10068739 | End-hall ion source with enhanced radiation cooling | James R. Kahn, Richard E. Nethery | 2018-09-04 |
| 8994258 | End-hall ion source with enhanced radiation cooling | James R. Kahn, Richard E. Nethery | 2015-03-31 |
| 8698401 | Mitigation of plasma-inductor termination | James R. Kahn | 2014-04-15 |
| 7843138 | Power supply for a hot-filament cathode | Steven J. Geissler, James R. Kahn | 2010-11-30 |
| 7728498 | Industrial hollow cathode | Chris M. Shonka, James R. Kahn | 2010-06-01 |
| 7667379 | Industrial hollow cathode with radiation shield structure | James R. Kahn | 2010-02-23 |
| 6911789 | Power supply for a hot-filament cathode | Steven J. Geissler, James R. Kahn, Denis Shaw | 2005-06-28 |
| 6870164 | Pulsed operation of hall-current ion sources | David A. Baldwin, Boris Ciorneiu | 2005-03-22 |
| 6864485 | Ion optics with shallow dished grids | James R. Kahn, Cheryl Phillips | 2005-03-08 |
| 6843891 | Apparatus for sputter deposition | James R. Kahn, Viacheslav V. Zhurin, David A. Baldwin, Todd Hylton | 2005-01-18 |
| 6750600 | Hall-current ion source | James R. Kahn, Raymond S. Robinson, Viacheslav V. Zhurin | 2004-06-15 |
| 6724160 | Ion-source neutralization with a hot-filament cathode-neutralizer | James R. Kahn, Viacheslav V. Zhurin | 2004-04-20 |
| 6682634 | Apparatus for sputter deposition | James R. Kahn, Viacheslav V. Zhurin, David A. Baldwin, Todd Hylton | 2004-01-27 |
| 6608431 | Modular gridless ion source | — | 2003-08-19 |
| 6454910 | Ion-assisted magnetron deposition | Viacheslav V. Zhurin, James R. Kahn, Kirk A. Thompson | 2002-09-24 |
| 6456011 | Magnetic field for small closed-drift ion source | Antonina Ivanovna Bugrova, Aleksei Vasilievich Desiatskov, Aleksei Ivanovich Morozov, Vadim Konstantinovich Kharchevnikov, Viacheslav V. Zhurin | 2002-09-24 |
| 6323586 | Closed drift hollow cathode | Viacheslav V. Zhurin, James R. Kahn | 2001-11-27 |
| 6246162 | Ion optics | James R. Kahn, Raymond S. Robinson | 2001-06-12 |
| 5793195 | Angular distribution probe | Raymond S. Robinson, James R. Kahn | 1998-08-11 |
| 5763989 | Closed drift ion source with improved magnetic field | — | 1998-06-09 |
| 5274306 | Capacitively coupled radiofrequency plasma source | Raymond S. Robinson | 1993-12-28 |
| 5154635 | Coaxial vacuum cable | Raymond S. Robinson | 1992-10-13 |
| 4954751 | Radio frequency hollow cathode | Raymond S. Robinson | 1990-09-04 |
| 4873467 | Ion source with particular grid assembly | Raymond S. Robinson | 1989-10-10 |
| 4862032 | End-Hall ion source | Raymond S. Robinson | 1989-08-29 |