Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6750600 | Hall-current ion source | Harold R. Kaufman, James R. Kahn, Viacheslav V. Zhurin | 2004-06-15 |
| 6246162 | Ion optics | James R. Kahn, Harold R. Kaufman | 2001-06-12 |
| 5793195 | Angular distribution probe | Harold R. Kaufman, James R. Kahn | 1998-08-11 |
| 5274306 | Capacitively coupled radiofrequency plasma source | Harold R. Kaufman | 1993-12-28 |
| 5154635 | Coaxial vacuum cable | Harold R. Kaufman | 1992-10-13 |
| 4954751 | Radio frequency hollow cathode | Harold R. Kaufman | 1990-09-04 |
| 4873467 | Ion source with particular grid assembly | Harold R. Kaufman | 1989-10-10 |
| 4862032 | End-Hall ion source | Harold R. Kaufman | 1989-08-29 |
| 4684848 | Broad-beam electron source | Harold R. Kaufman | 1987-08-04 |
| 4481062 | Electron bombardment ion sources | Harold R. Kaufman, William E. Hughes | 1984-11-06 |