Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8329002 | Thin films and methods and machines for forming the thin films | Anthony Githinji, Sami C. Antrazi | 2012-12-11 |
| 7316764 | System and method for performing sputter etching using independent ion and electron sources and a substrate biased with an a-symmetric bi-polar DC pulse signal | Todd Hylton | 2008-01-08 |
| 7177506 | Method for forming an aligned optical sub-assembly | Michael Joseph Minnemann | 2007-02-13 |
| 6870164 | Pulsed operation of hall-current ion sources | Boris Ciorneiu, Harold R. Kaufman | 2005-03-22 |
| 6843891 | Apparatus for sputter deposition | James R. Kahn, Harold R. Kaufman, Viacheslav V. Zhurin, Todd Hylton | 2005-01-18 |
| 6819871 | Multi-channel optical filter and multiplexer formed from stacks of thin-film layers | Todd Hylton | 2004-11-16 |
| 6723209 | System and method for performing thin film deposition or chemical treatment using an energetic flux of neutral reactive molecular fragments, atoms or radicals | Todd Hylton | 2004-04-20 |
| 6689255 | System and method for making thin-film structures using a stepped profile mask | Todd Hylton | 2004-02-10 |
| 6682634 | Apparatus for sputter deposition | James R. Kahn, Harold R. Kaufman, Viacheslav V. Zhurin, Todd Hylton | 2004-01-27 |
| 6679976 | System and method for performing sputter deposition with multiple targets using independent ion and electron sources and independent target biasing with DC pulse signals | Todd Hylton | 2004-01-20 |
| 6610179 | System and method for controlling deposition thickness using a mask with a shadow that varies with respect to a target | Todd Hylton | 2003-08-26 |
| 6488821 | System and method for performing sputter deposition using a divergent ion beam source and a rotating substrate | Todd Hylton | 2002-12-03 |
| 6419803 | System and method for making thin-film structures using a stepped profile mask | Todd Hylton | 2002-07-16 |
| 6419802 | System and method for controlling deposition thickness by synchronously varying a sputtering rate of a target with respect to a position of a rotating substrate | Todd Hylton | 2002-07-16 |
| 6402901 | System and method for performing sputter deposition using a spherical geometry | Todd Hylton | 2002-06-11 |
| 6402905 | System and method for controlling deposition thickness using a mask with a shadow that varies along a radius of a substrate | Todd Hylton | 2002-06-11 |
| 6402904 | System and method for performing sputter deposition using independent ion and electron sources and a target biased with an a-symmetric bi-polar DC pulse signal | Todd Hylton | 2002-06-11 |
| 6402900 | System and method for performing sputter deposition using ion sources, targets and a substrate arranged about the faces of a cube | Todd Hylton | 2002-06-11 |
| 6373364 | Electromagnet for thin-film processing with winding pattern for reducing skew | Jeong Woo SON | 2002-04-16 |
| D452866 | Electronics cabinet face | Syed S. Towheed | 2002-01-08 |
| 5616179 | Process for deposition of diamondlike, electrically conductive and electron-emissive carbon-based films | Stephen Michel | 1997-04-01 |
| 4617836 | Transmission systems for tracked vehicles | — | 1986-10-21 |