| 8329002 |
Thin films and methods and machines for forming the thin films |
Anthony Githinji, Sami C. Antrazi |
2012-12-11 |
| 7316764 |
System and method for performing sputter etching using independent ion and electron sources and a substrate biased with an a-symmetric bi-polar DC pulse signal |
Todd Hylton |
2008-01-08 |
| 7177506 |
Method for forming an aligned optical sub-assembly |
Michael Joseph Minnemann |
2007-02-13 |
| 6870164 |
Pulsed operation of hall-current ion sources |
Boris Ciorneiu, Harold R. Kaufman |
2005-03-22 |
| 6843891 |
Apparatus for sputter deposition |
James R. Kahn, Harold R. Kaufman, Viacheslav V. Zhurin, Todd Hylton |
2005-01-18 |
| 6819871 |
Multi-channel optical filter and multiplexer formed from stacks of thin-film layers |
Todd Hylton |
2004-11-16 |
| 6723209 |
System and method for performing thin film deposition or chemical treatment using an energetic flux of neutral reactive molecular fragments, atoms or radicals |
Todd Hylton |
2004-04-20 |
| 6689255 |
System and method for making thin-film structures using a stepped profile mask |
Todd Hylton |
2004-02-10 |
| 6682634 |
Apparatus for sputter deposition |
James R. Kahn, Harold R. Kaufman, Viacheslav V. Zhurin, Todd Hylton |
2004-01-27 |
| 6679976 |
System and method for performing sputter deposition with multiple targets using independent ion and electron sources and independent target biasing with DC pulse signals |
Todd Hylton |
2004-01-20 |
| 6610179 |
System and method for controlling deposition thickness using a mask with a shadow that varies with respect to a target |
Todd Hylton |
2003-08-26 |
| 6488821 |
System and method for performing sputter deposition using a divergent ion beam source and a rotating substrate |
Todd Hylton |
2002-12-03 |
| 6419803 |
System and method for making thin-film structures using a stepped profile mask |
Todd Hylton |
2002-07-16 |
| 6419802 |
System and method for controlling deposition thickness by synchronously varying a sputtering rate of a target with respect to a position of a rotating substrate |
Todd Hylton |
2002-07-16 |
| 6402901 |
System and method for performing sputter deposition using a spherical geometry |
Todd Hylton |
2002-06-11 |
| 6402905 |
System and method for controlling deposition thickness using a mask with a shadow that varies along a radius of a substrate |
Todd Hylton |
2002-06-11 |
| 6402904 |
System and method for performing sputter deposition using independent ion and electron sources and a target biased with an a-symmetric bi-polar DC pulse signal |
Todd Hylton |
2002-06-11 |
| 6402900 |
System and method for performing sputter deposition using ion sources, targets and a substrate arranged about the faces of a cube |
Todd Hylton |
2002-06-11 |
| 6373364 |
Electromagnet for thin-film processing with winding pattern for reducing skew |
Jeong Woo SON |
2002-04-16 |
| D452866 |
Electronics cabinet face |
Syed S. Towheed |
2002-01-08 |
| 5616179 |
Process for deposition of diamondlike, electrically conductive and electron-emissive carbon-based films |
Stephen Michel |
1997-04-01 |
| 4617836 |
Transmission systems for tracked vehicles |
— |
1986-10-21 |