Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9536713 | Reliable plasma ignition and reignition | Gideon Van Zyl, David W. Madsen | 2017-01-03 |
| 9478397 | System level power delivery to a plasma processing load | Thomas Joel Blackburn, Thomas J. McIntyre | 2016-10-25 |
| 9088267 | System level power delivery to a plasma processing load | Thomas Joel Blackburn, Thomas J. McIntyre | 2015-07-21 |
| 7942112 | Method and apparatus for preventing the formation of a plasma-inhibiting substance | Justin Mauck, Andrew Shabalin, Denis Shaw, Juan Jose Gonzalez | 2011-05-17 |
| 7547005 | System and method for delivering vapor | Justin Mauck, Juan Jose Gonzalez | 2009-06-16 |
| 7468494 | Reaction enhancing gas feed for injecting gas into a plasma chamber | Juan Jose Gonzalez, Andrew Shabalin | 2008-12-23 |
| 7245084 | Transformer ignition circuit for a transformer coupled plasma source | Juan Jose Gonzalez, Andrew Shabalin, Steven J. Geissler | 2007-07-17 |
| 7115185 | Pulsed excitation of inductively coupled plasma sources | Juan Jose Gonzalez, Andrew Shabalin | 2006-10-03 |
| 7005845 | Power measurement mechanism for a transformer coupled plasma source | Juan Jose Gonzalez, Steven J. Geissler | 2006-02-28 |
| 6946063 | Deterioration resistant chambers for inductively coupled plasma production | Juan Jose Gonzalez, Steve Dillon, Andrew Shabalin, Justin Mauck | 2005-09-20 |
| 6927358 | Vacuum seal protection in a dielectric break | Juan Jose Gonzalez, Steve Dillon, Andrew Shabalin | 2005-08-09 |
| 6822396 | Transformer ignition circuit for a transformer coupled plasma source | Juan Jose Gonzalez, Andrew Shabalin, Steven J. Geissler | 2004-11-23 |
| 6819096 | Power measurement mechanism for a transformer coupled plasma source | Juan Jose Gonzalez, Steven J. Geissler | 2004-11-16 |
| 6724148 | Mechanism for minimizing ion bombardment energy in a plasma chamber | Juan Jose Gonzalez, Andrew Shabalin | 2004-04-20 |