| 12186832 |
Pulse train annealing method and apparatus |
Joseph M. Ranish |
2025-01-07 |
|
| 11981999 |
Supplemental energy for low temperature processes |
David K. Carlson |
2024-05-14 |
$61,768,000 |
| 11947888 |
Semiconductor processing tools with improved performance by use of hybrid learning models |
Sheldon R. Normand, Dermot Cantwell |
2024-04-02 |
$42,223,000 |
| 11735447 |
Enhanced process and hardware architecture to detect and correct realtime product substrates |
Kartik Santhanam, Kartik Shah, Wolfgang Aderhold, Martin A. Hilkene |
2023-08-22 |
$40,609,000 |
| 11586794 |
Semiconductor processing tools with improved performance by use of hybrid learning models |
Sheldon R. Normand, Dermot Cantwell |
2023-02-21 |
$24,540,000 |
| 11529592 |
Gas injector with baffle |
Vishwas Kumar Pandey, Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen +4 more |
2022-12-20 |
$39,023,000 |
| 11411039 |
Stacked pixel structure formed using epitaxy |
Papo CHEN, John Boland, Schubert S. Chu, Errol Antonio C. Sanchez |
2022-08-09 |
$67,965,000 |
| D959490 |
Display screen or portion thereof with graphical user interface |
Kartik Shah, Kartik Santhanam, Bindusagar Marath Sankarathodi, Abhilash J. Mayur, Dayal Ramachandran +2 more |
2022-08-02 |
|
| 11348769 |
Plasma-enhanced anneal chamber for wafer outgassing |
Lara Hawrylchak, Matthew D. Scotney-Castle, Norman L. Tam, Matthew Spuller, Kong CHAN +1 more |
2022-05-31 |
$62,587,000 |
| 11077410 |
Gas injector with baffle |
Vishwas Kumar Pandey, Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen +4 more |
2021-08-03 |
$89,613,000 |
| 11040415 |
Pulse train annealing method and apparatus |
Joseph M. Ranish |
2021-06-22 |
$66,836,000 |
| 10840100 |
Method of thermal processing structures formed on a substrate |
Paul G. Carey, Aaron Muir Hunter, Dean Jennings, Abhilash J. Mayur, William Schaffer +2 more |
2020-11-17 |
$41,112,000 |
| 10508341 |
Apparatus and methods for pulsed photo-excited deposition and etch |
— |
2019-12-17 |
$25,541,000 |
| 10370762 |
Apparatus and methods for photo-excitation processes |
— |
2019-08-06 |
$24,698,000 |
| 10181409 |
Thermal processing apparatus |
Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more |
2019-01-15 |
$61,415,000 |
| 10141191 |
Method of thermal processing structures formed on a substrate |
Paul G. Carey, Aaron Muir Hunter, Dean Jennings, Abhilash J. Mayur, William Schaffer +2 more |
2018-11-27 |
$52,277,000 |
| 10109514 |
Visual feedback for process control in RTP chambers |
Kim Vellore, Dinesh Kanawade, Aaron Miller, Leonid M. Tertitski, Norman L. Tam +2 more |
2018-10-23 |
$19,549,000 |
| 10094618 |
Ambient laminar gas flow distribution in laser processing systems |
Aaron Muir Hunter |
2018-10-09 |
|
| 10074538 |
Methods for crystallizing a substrate using a plurality of laser pulses and freeze periods |
Bruce E. Adams, Aaron Muir Hunter |
2018-09-11 |
$27,448,000 |
| 10061208 |
Photonic activation of reactants for sub-micron feature formation using depleted beams |
James Francis Mack |
2018-08-28 |
$23,630,000 |
| 9953851 |
Process sheet resistance uniformity improvement using multiple melt laser exposures |
Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Kim Vellore, Samuel C. Howells |
2018-04-24 |
$74,029,000 |
| 9927622 |
Multiple beam combiner for laser processing apparatus |
Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more |
2018-03-27 |
$21,583,000 |
| 9909925 |
Apparatus and method to measure temperature of 3D semiconductor structures via laser diffraction |
Heng Pan, Matthew S. Rogers, Aaron Muir Hunter |
2018-03-06 |
$32,877,000 |
| 9908200 |
Apparatus and method of improving beam shaping and beam homogenization |
Bruce E. Adams, Samuel C. Howells, Dean Jennings, Jiping Li, Timothy N. Thomas |
2018-03-06 |
$32,877,000 |
| 9904069 |
Apparatus and method for speckle reduction in laser processing equipment |
— |
2018-02-27 |
$32,297,000 |
