Issued Patents All Time
Showing 25 most recent of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12186832 | Pulse train annealing method and apparatus | Joseph M. Ranish | 2025-01-07 |
| 11981999 | Supplemental energy for low temperature processes | David K. Carlson | 2024-05-14 |
| 11947888 | Semiconductor processing tools with improved performance by use of hybrid learning models | Sheldon R. Normand, Dermot Cantwell | 2024-04-02 |
| 11735447 | Enhanced process and hardware architecture to detect and correct realtime product substrates | Kartik Santhanam, Kartik Shah, Wolfgang Aderhold, Martin A. Hilkene | 2023-08-22 |
| 11586794 | Semiconductor processing tools with improved performance by use of hybrid learning models | Sheldon R. Normand, Dermot Cantwell | 2023-02-21 |
| 11529592 | Gas injector with baffle | Vishwas Kumar Pandey, Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen +4 more | 2022-12-20 |
| 11411039 | Stacked pixel structure formed using epitaxy | Papo CHEN, John Boland, Schubert S. Chu, Errol Antonio C. Sanchez | 2022-08-09 |
| D959490 | Display screen or portion thereof with graphical user interface | Kartik Shah, Kartik Santhanam, Bindusagar Marath Sankarathodi, Abhilash J. Mayur, Dayal Ramachandran +2 more | 2022-08-02 |
| 11348769 | Plasma-enhanced anneal chamber for wafer outgassing | Lara Hawrylchak, Matthew D. Scotney-Castle, Norman L. Tam, Matthew Spuller, Kong CHAN +1 more | 2022-05-31 |
| 11077410 | Gas injector with baffle | Vishwas Kumar Pandey, Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen +4 more | 2021-08-03 |
| 11040415 | Pulse train annealing method and apparatus | Joseph M. Ranish | 2021-06-22 |
| 10840100 | Method of thermal processing structures formed on a substrate | Paul G. Carey, Aaron Muir Hunter, Dean Jennings, Abhilash J. Mayur, William Schaffer +2 more | 2020-11-17 |
| 10508341 | Apparatus and methods for pulsed photo-excited deposition and etch | — | 2019-12-17 |
| 10370762 | Apparatus and methods for photo-excitation processes | — | 2019-08-06 |
| 10181409 | Thermal processing apparatus | Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more | 2019-01-15 |
| 10141191 | Method of thermal processing structures formed on a substrate | Paul G. Carey, Aaron Muir Hunter, Dean Jennings, Abhilash J. Mayur, William Schaffer +2 more | 2018-11-27 |
| 10109514 | Visual feedback for process control in RTP chambers | Kim Vellore, Dinesh Kanawade, Aaron Miller, Leonid M. Tertitski, Norman L. Tam +2 more | 2018-10-23 |
| 10094618 | Ambient laminar gas flow distribution in laser processing systems | Aaron Muir Hunter | 2018-10-09 |
| 10074538 | Methods for crystallizing a substrate using a plurality of laser pulses and freeze periods | Bruce E. Adams, Aaron Muir Hunter | 2018-09-11 |
| 10061208 | Photonic activation of reactants for sub-micron feature formation using depleted beams | James Francis Mack | 2018-08-28 |
| 9953851 | Process sheet resistance uniformity improvement using multiple melt laser exposures | Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Kim Vellore, Samuel C. Howells | 2018-04-24 |
| 9927622 | Multiple beam combiner for laser processing apparatus | Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more | 2018-03-27 |
| 9908200 | Apparatus and method of improving beam shaping and beam homogenization | Bruce E. Adams, Samuel C. Howells, Dean Jennings, Jiping Li, Timothy N. Thomas | 2018-03-06 |
| 9909925 | Apparatus and method to measure temperature of 3D semiconductor structures via laser diffraction | Heng Pan, Matthew S. Rogers, Aaron Muir Hunter | 2018-03-06 |
| 9904069 | Apparatus and method for speckle reduction in laser processing equipment | — | 2018-02-27 |