Issued Patents All Time
Showing 26–50 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9869938 | Photonic activation of reactants for sub-micron feature formation using depleted beams | James Francis Mack | 2018-01-16 |
| 9762021 | Broadband laser source for laser thermal processing and photonically activated processes | — | 2017-09-12 |
| 9735034 | Visual feedback for process control in RTP chambers | Kim Vellore, Dinesh Kanawade, Aaron Miller, Leonid M. Tertitski, Norman L. Tam +2 more | 2017-08-15 |
| 9685186 | HDD pattern implant system | Majeed A. Foad, Jacob Newman, Jose Antonio Marin, Daniel J. Hoffman, Steven Verhaverbeke | 2017-06-20 |
| 9595459 | Managing thermal budget in annealing of substrates | Abhilash J. Mayur, Sundar Ramamurthy, Joseph M. Ranish, Aaron Muir Hunter | 2017-03-14 |
| 9557111 | Ambient laminar gas flow distribution in laser processing systems | Aaron Muir Hunter | 2017-01-31 |
| 9498845 | Pulse train annealing method and apparatus | Joseph M. Ranish | 2016-11-22 |
| 9499909 | Methods for photo-excitation of precursors in epitaxial processes using a rotary scanning unit | — | 2016-11-22 |
| 9466500 | Method and apparatus for direct formation of nanometer scaled features | James Francis Mack | 2016-10-11 |
| 9455145 | Crystallization processing for semiconductor applications | — | 2016-09-27 |
| 9390926 | Process sheet resistance uniformity improvement using multiple melt laser exposures | Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Kim Vellore, Samuel C. Howells | 2016-07-12 |
| 9376731 | Magneto-thermal processing apparatus and methods | — | 2016-06-28 |
| 9373511 | Methods for crystallizing a substrate using energy pulses and freeze periods | Bruce E. Adams, Aaron Muir Hunter | 2016-06-21 |
| 9341858 | Apparatus and method for speckle reduction in laser processing equipment | — | 2016-05-17 |
| 9290858 | Crystallization processing for semiconductor applications | — | 2016-03-22 |
| 9285595 | Multiple beam combiner for laser processing apparatus | Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more | 2016-03-15 |
| 9209347 | Laser crystallization and polycrystal efficiency improvement for thin film solar | — | 2015-12-08 |
| 9146337 | Apparatus for speckle reduction, pulse stretching, and beam homogenization | Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Douglas E. Holmgren, Samuel C. Howells +1 more | 2015-09-29 |
| 9123527 | Apparatus and methods for pulsed photo-excited deposition and etch | — | 2015-09-01 |
| 9114479 | Managing thermal budget in annealing of substrates | Abhilash J. Mayur, Sundar Ramamurthy, Joseph M. Ranish, Aaron Muir Hunter | 2015-08-25 |
| 9069183 | Apparatus and method for speckle reduction in laser processing equipment | — | 2015-06-30 |
| 9018110 | Apparatus and methods for microwave processing of semiconductor substrates | Michael W. Stowell, Majeed A. Foad, Ralf Hofmann, Wolfgang Aderhold | 2015-04-28 |
| 8970963 | Multiple beam combiner for laser processing apparatus | Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more | 2015-03-03 |
| 8956562 | Apparatus and methods to manufacture high density magnetic media | — | 2015-02-17 |
| 8906725 | Crystallization processing for semiconductor applications | — | 2014-12-09 |