Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10354882 | Low thermal budget crystallization of amorphous metal silicides | Bencherki Mebarki, Xianmin Tang, Jerome Machillot | 2019-07-16 |
| 9947578 | Methods for forming low-resistance contacts through integrated process flow systems | Yu Lei, Vikash Banthia, Kai Wu, Xinyu Fu, Yi Xu +9 more | 2018-04-17 |
| 9812328 | Methods for forming low resistivity interconnects | Kaushal K. Singh, Er-Xuan Ping, Xianmin Tang, Randhir P. S. Thakur | 2017-11-07 |
| 9595459 | Managing thermal budget in annealing of substrates | Stephen Moffatt, Abhilash J. Mayur, Joseph M. Ranish, Aaron Muir Hunter | 2017-03-14 |
| 9431278 | Backside rapid thermal processing of patterned wafers | Wolfgang Aderhold, Aaron Muir Hunter | 2016-08-30 |
| 9373516 | Method and apparatus for forming gate stack on Si, SiGe or Ge channels | Khaled Ahmed, Steven C. H. Hung, Kaushal K. Singh | 2016-06-21 |
| 9114479 | Managing thermal budget in annealing of substrates | Stephen Moffatt, Abhilash J. Mayur, Joseph M. Ranish, Aaron Muir Hunter | 2015-08-25 |
| 8888916 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Agus Sofian Tjandra, Robert Navasca +3 more | 2014-11-18 |
| 8658945 | Backside rapid thermal processing of patterned wafers | Wolfgang Aderhold, Aaron Muir Hunter | 2014-02-25 |
| 8608853 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Agus Sofian Tjandra, Robert Navasca +3 more | 2013-12-17 |
| 8536492 | Processing multilayer semiconductors with multiple heat sources | Andreas Hegedus, Randhir P. S. Thakur | 2013-09-17 |
| 8497193 | Method of thermally treating silicon with oxygen | Yoshitaka Yokota, Vedapuram S. Achutharaman, Cory Czarnik, Mehran Behdjat, Christopher S. Olsen | 2013-07-30 |
| 8409353 | Water cooled gas injector | Yoshitaka Yokota, Vedapuram S. Achutharaman, Cory Czarnik, Mehran Behdjat, Christopher S. Olsen | 2013-04-02 |
| 8314369 | Managing thermal budget in annealing of substrates | Stephen Moffatt, Abhilash J. Mayur, Joseph M. Ranish, Aaron Muir Hunter | 2012-11-20 |
| 8056500 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Agus Sofian Tjandra, Robert Navasca +3 more | 2011-11-15 |
| 7986871 | Processing multilayer semiconductors with multiple heat sources | Andreas Hegedus, Randhir P. S. Thakur | 2011-07-26 |
| 7972441 | Thermal oxidation of silicon using ozone | Yoshitaka Yokota, Vedapuram S. Achutharaman, Cory Czarnik, Mehran Behdjat, Christopher S. Olsen | 2011-07-05 |
| 7923660 | Pulsed laser anneal system architecture | Alexander Lerner, Timothy N. Thomas | 2011-04-12 |
| 7811877 | Method of controlling metal silicide formation | Majeed A. Foad | 2010-10-12 |
| 7700376 | Edge temperature compensation in thermal processing particularly useful for SOI wafers | Juan Chacin, Sairaju Tallavajula | 2010-04-20 |
| 7509035 | Lamp array for thermal processing exhibiting improved radial uniformity | Joseph M. Ranish, Corina E. Tanasa, Claudia Lai, Ravi Jallepally, Ramachandran Balasubramanian +3 more | 2009-03-24 |
| 7414224 | Backside rapid thermal processing of patterned wafers | Wolfgang Aderhold, Aaron Muir Hunter | 2008-08-19 |
| 7241345 | Cylinder for thermal processing chamber | Vedapuram S. Achutharaman, Ho Fang | 2007-07-10 |
| 7127367 | Tailored temperature uniformity | Balasubramanian Ramachandran, Joseph M. Ranish, Ravi Jallepally, Raman Achutharaman, Brian Haas +1 more | 2006-10-24 |
| 7041931 | Stepped reflector plate | Dean Jennings, Joseph M. Ranish, Brian Haas, Ajit Balakrishna, Aaron Muir Hunter +1 more | 2006-05-09 |