Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10519546 | Apparatus and method for providing a uniform flow of gas | Muhammad M. Rasheed, Ilker Durukan | 2019-12-31 |
| 10167553 | Apparatus and method for providing a uniform flow of gas | Muhammad M. Rasheed, Ilker Durukan | 2019-01-01 |
| 7921803 | Chamber components with increased pyrometry visibility | Joseph Yudovsky, Brendan McDougall, Yi-Chiau Huang, Maitreyee Mahajani, Kevin Griffin +1 more | 2011-04-12 |
| 7509035 | Lamp array for thermal processing exhibiting improved radial uniformity | Joseph M. Ranish, Corina E. Tanasa, Sundar Ramamurthy, Claudia Lai, Ramachandran Balasubramanian +3 more | 2009-03-24 |
| 7127367 | Tailored temperature uniformity | Balasubramanian Ramachandran, Joseph M. Ranish, Sundar Ramamurthy, Raman Achutharaman, Brian Haas +1 more | 2006-10-24 |
| 6897131 | Advances in spike anneal processes for ultra shallow junctions | Balasubramanian Ramachandran, Ryan Boas, Sundar Ramamurthy, Amir Al-Bayati, Houda Graoui +1 more | 2005-05-24 |
| 6773507 | Apparatus and method for fast-cycle atomic layer deposition | Shih-Hung Li, Alain Duboust, Jun Zhao, Liang-Yuh Chen, Daniel Carl | 2004-08-10 |
| 6450116 | Apparatus for exposing a substrate to plasma radicals | David B. Noble, Nathan D'Astici, Gary E. Miner, Turgut Sahin, Guangcai Xing +1 more | 2002-09-17 |