Issued Patents All Time
Showing 25 most recent of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269584 | N-metal film deposition with initiation layer | Seshadri Ganguli, Xinliang Lu, Atif Noori, Shih Chung Chen, Mei Chang | 2016-02-23 |
| 9048183 | NMOS metal gate materials, manufacturing methods, and equipment using CVD and ALD processes with metal based precursors | Seshadri Ganguli, Srinivas Gandikota, Yu Lei, Xinliang Lu, Sang Ho Yu +4 more | 2015-06-02 |
| 8987080 | Methods for manufacturing metal gates | Xinliang Lu, Seshadri Ganguli, Atif Noori, Shih Chung Chen, Yu Lei +3 more | 2015-03-24 |
| 8951861 | Methods of making a high-density nonvolatile memory | Scott Brad Herner | 2015-02-10 |
| 8895443 | N-metal film deposition with initiation layer | Seshadri Ganguli, Xinliang Lu, Atif Noori, Shih Chung Chen, Mei Chang | 2014-11-25 |
| 8778816 | In situ vapor phase surface activation of SiO2 | Tatsuya Sato, David Thompson, Jeffrey W. Anthis, Vladimir Zubkov, Steven Verhaverbeke +3 more | 2014-07-15 |
| 8642468 | NMOS metal gate materials, manufacturing methods, and equipment using CVD and ALD processes with metal based precursors | Seshadri Ganguli, Srinivas Gandikota, Yu Lei, Xinliang Lu, Sang Ho Yu +4 more | 2014-02-04 |
| 8633119 | Methods for manufacturing high dielectric constant films | Tatsuya Sato | 2014-01-21 |
| 8633114 | Methods for manufacturing high dielectric constant films | Tatsuya Sato | 2014-01-21 |
| 8592305 | Doping aluminum in tantalum silicide | Xinliang Lu, Seshadri Ganguli, Shih Chung Chen, Atif Noori, Mei Chang | 2013-11-26 |
| 8383478 | High-density nonvolatile memory and methods of making the same | Scott Brad Herner | 2013-02-26 |
| 8361910 | Pretreatment processes within a batch ALD reactor | — | 2013-01-29 |
| 8043907 | Atomic layer deposition processes for non-volatile memory devices | Yi Ma, Shreyas Kher, Khaled Ahmed, Tejal Goyani, Jallepally Ravi +1 more | 2011-10-25 |
| 8004033 | High-density nonvolatile memory | S. Brad Herner | 2011-08-23 |
| 7972978 | Pretreatment processes within a batch ALD reactor | — | 2011-07-05 |
| 7921803 | Chamber components with increased pyrometry visibility | Joseph Yudovsky, Brendan McDougall, Ravi Jallepally, Yi-Chiau Huang, Kevin Griffin +1 more | 2011-04-12 |
| 7915164 | Method for forming doped polysilicon via connecting polysilicon layers | Michael Konevecki, Usha Raghuram, Sucheta Nallamothu, Andrew J. Walker, Tanmay Kumar | 2011-03-29 |
| 7915163 | Method for forming doped polysilicon via connecting polysilicon layers | Michael Konevecki, Usha Raghuram, Sucheta Nallamothu, Andrew J. Walker, Tanmay Kumar | 2011-03-29 |
| 7897208 | Low temperature ALD SiO2 | Yi-Chiau Huang, Brendan McDougall | 2011-03-01 |
| 7798096 | Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool | Joseph Yudovsky, Brendan McDougall | 2010-09-21 |
| 7776395 | Method of depositing catalyst assisted silicates of high-k materials | — | 2010-08-17 |
| 7749574 | Low temperature ALD SiO2 | Yi-Chiau Huang, Brendan McDougall | 2010-07-06 |
| 7659158 | Atomic layer deposition processes for non-volatile memory devices | Yi Ma, Shreyas Kher, Khaled Ahmed, Tejal Goyani, Jallepally Ravi +1 more | 2010-02-09 |
| 7572052 | Method for monitoring and calibrating temperature in semiconductor processing chambers | Jallepally Ravi, Yi-Chiau Huang | 2009-08-11 |
| 7566974 | Doped polysilicon via connecting polysilicon layers | Michael Konevecki, Usha Raghuram, Tanmay Kumar, Sucheta Nallamothu, Andrew J. Walker | 2009-07-28 |