Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1089130 | Process chamber manifold | Geraldine VASQUEZ, Shreyas Patil Shanthaveeraswamy, Mehran Behdjat, Dien-Yeh Wu, Yu Lei +3 more | 2025-08-19 |
| 12315746 | Bottom cover plate to reduce wafer planar nonuniformity | Zubin Huang, Srinivas Tokur Mohana, Sandesh Yadamane, Kai WU, Xiaozhou YU +1 more | 2025-05-27 |
| 12230479 | Processing chamber with multiple plasma units | Kazuya Daito, Yi Xu, Yu Lei, Takashi Kuratomi, Pingyan Lei +1 more | 2025-02-18 |
| 12228395 | Substrate position calibration for substrate supports in substrate processing systems | Tomoharu Matsushita, Aravind Kamath, Cheng-Hsiung Tsai, Hiroyuki Takahama | 2025-02-18 |
| 12152302 | Multiple-channel showerhead design and methods in manufacturing | Kazuya Daito, Harpreet Singh | 2024-11-26 |
| 12016092 | Gas distribution ceramic heater for deposition chamber | Pingyan Lei, Dien-Yeh Wu, Manjunatha Koppa, Ambarish Toorihal, Sandesh Yadamane +2 more | 2024-06-18 |
| 11955319 | Processing chamber with multiple plasma units | Kazuya Daito, Yi Xu, Yu Lei, Takashi Kuratomi, Pingyan Lei +1 more | 2024-04-09 |
| 11955381 | Low-temperature plasma pre-clean for selective gap fill | Yi Xu, Yufei Hu, Kazuya Daito, Geraldine VASQUEZ, Da He +2 more | 2024-04-09 |
| 11939668 | Gas delivery for tungsten-containing layer | Zubin Huang, Mohammed Jaheer SHERFUDEEN, David Santi, Peiqi WANG, Kai WU | 2024-03-26 |
| D1009817 | Shadow ring lift pin | Zubin Huang, Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Harpreet Singh +1 more | 2024-01-02 |
| D997893 | Shadow ring lift plate | Zubin Huang, Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Harpreet Singh +1 more | 2023-09-05 |
| D997894 | Shadow ring lift assembly | Zubin Huang, Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Harpreet Singh +1 more | 2023-09-05 |
| 11721542 | Dual plasma pre-clean for selective gap fill | Yi Xu, Yufei Hu, Kazuya Daito, Yu Lei, Dien-Yeh Wu | 2023-08-08 |
| 11555244 | High temperature dual chamber showerhead | Pingyan Lei, Dien-Yeh Wu, Takashi Kuratomi, Xiaoxiong Yuan, Manjunatha Koppa +1 more | 2023-01-17 |
| 11201078 | Substrate position calibration for substrate supports in substrate processing systems | Tomoharu Matsushita, Aravind Kamath, Cheng-Hsiung Tsai, Hiroyuki Takahama | 2021-12-14 |
| 10892180 | Lift pin assembly | Bonnie T. Chia, Manjunatha Koppa, Vinod Konda Purathe, Cheng-Hsiung Tsai, Aravind Kamath | 2021-01-12 |
| 10312116 | Methods and apparatus for rapidly cooling a substrate | Steven V. Sansoni, Kirankumar Neelasandra SAVANDAIAH | 2019-06-04 |
| 10199204 | Target retaining apparatus | Srinivasa Rao YEDLA, Sundarapandian Ramalinga Vijayalakshmi REDDY, Uday Pai, Kirankumar Neelasandra SAVANDAIAH, Thanh X. Nguyen +1 more | 2019-02-05 |
| 10134615 | Substrate support with improved RF return | Aravind Kamath, Cheng-Hsiung Tsai, Tomoharu Matsushita, Yu Chang | 2018-11-20 |
| 9888528 | Substrate support with multiple heating zones | Tomoharu Matsushita, Cheng-Hsiung Tsai, Aravind Kamath, Xiaoxiong Yuan, Manjunatha Koppa | 2018-02-06 |
| 9779971 | Methods and apparatus for rapidly cooling a substrate | Steven V. Sansoni, Kirankumar Neelasandra SAVANDAIAH | 2017-10-03 |
| 8109669 | Temperature uniformity measurement during thermal processing | Wolfgang Aderhold, Balasubramanian Ramachandran, Aaron Muir Hunter, Ilias Iliopoulos | 2012-02-07 |
| 8043907 | Atomic layer deposition processes for non-volatile memory devices | Yi Ma, Shreyas Kher, Khaled Ahmed, Tejal Goyani, Maitreyee Mahajani +1 more | 2011-10-25 |
| 7659158 | Atomic layer deposition processes for non-volatile memory devices | Yi Ma, Shreyas Kher, Khaled Ahmed, Tejal Goyani, Maitreyee Mahajani +1 more | 2010-02-09 |
| 7572052 | Method for monitoring and calibrating temperature in semiconductor processing chambers | Maitreyee Mahajani, Yi-Chiau Huang | 2009-08-11 |