| D1101709 |
Process chamber shower head |
Geraldine VASQUEZ, Shreyas Patil Shanthaveeraswamy, Yi Xu, Sandesh Yadamane, Dien-Yeh Wu +2 more |
2025-11-11 |
|
| D1089130 |
Process chamber manifold |
Geraldine VASQUEZ, Shreyas Patil Shanthaveeraswamy, Mehran Behdjat, Dien-Yeh Wu, Jallepally Ravi +3 more |
2025-08-19 |
|
| 12016092 |
Gas distribution ceramic heater for deposition chamber |
Pingyan Lei, Dien-Yeh Wu, Jallepally Ravi, Ambarish Toorihal, Sandesh Yadamane +2 more |
2024-06-18 |
$83,264,000 |
| 11887878 |
Detachable biasable electrostatic chuck for high temperature applications |
Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Tsai, Steven V. Sansoni |
2024-01-30 |
$39,141,000 |
| D1009817 |
Shadow ring lift pin |
Zubin Huang, Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Jallepally Ravi +1 more |
2024-01-02 |
|
| D997893 |
Shadow ring lift plate |
Zubin Huang, Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Jallepally Ravi +1 more |
2023-09-05 |
|
| D997894 |
Shadow ring lift assembly |
Zubin Huang, Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Jallepally Ravi +1 more |
2023-09-05 |
|
| 11555244 |
High temperature dual chamber showerhead |
Pingyan Lei, Dien-Yeh Wu, Jallepally Ravi, Takashi Kuratomi, Xiaoxiong Yuan +1 more |
2023-01-17 |
$39,427,000 |
| D960216 |
Base plate for a processing chamber substrate support |
Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Tsai, Steven V. Sansoni |
2022-08-09 |
|
| D947914 |
Base plate for a processing chamber substrate support |
Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Tsai, Steven V. Sansoni |
2022-04-05 |
|
| 11251028 |
Pre-clean chamber with integrated shutter garage |
Cheng-Hsiung Tsai, Ananthkrishna Jupudi, Sarath Babu, Hiroyuki Takahama |
2022-02-15 |
$65,265,000 |
| D942516 |
Process shield for a substrate processing chamber |
Aravind Kamath, Cheng-Hsiung Tsai, Manjunath H. Venkataswamappa, Steven V. Sansoni, David T. Or |
2022-02-01 |
|
| D933725 |
Deposition ring for a substrate processing chamber |
Aravind Kamath, Cheng-Hsiung Tsai, Manjunath H. Venkataswamappa, Steven V. Sansoni, David T. Or |
2021-10-19 |
|
| 10892180 |
Lift pin assembly |
Bonnie T. Chia, Jallepally Ravi, Vinod Konda Purathe, Cheng-Hsiung Tsai, Aravind Kamath |
2021-01-12 |
$84,921,000 |
| D893441 |
Base plate for a processing chamber substrate support |
Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Tsai, Steven V. Sansoni |
2020-08-18 |
|
| D891382 |
Process shield for a substrate processing chamber |
Aravind Kamath, Cheng-Hsiung Tsai, Manjunath H. Venkataswamappa, Steven V. Sansoni, David T. Or |
2020-07-28 |
|
| 10711348 |
Apparatus to improve substrate temperature uniformity |
Cheng-Hsiung Tsai, Youqun Dong |
2020-07-14 |
$28,056,000 |
| 10704142 |
Quick disconnect resistance temperature detector assembly for rotating pedestal |
Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez, Yu Chang, William Kuang +1 more |
2020-07-07 |
$29,619,000 |
| 10373860 |
Batch processing apparatus |
Mukund Sundararajan, Ananthkrishna Jupudi, Saket Rathi |
2019-08-06 |
$24,698,000 |
| 9984911 |
Electrostatic chuck design for high temperature RF applications |
Ryan Edwin Hanson, Vijay D. Parkhe, John C. Forster, Keith A. Miller |
2018-05-29 |
$37,048,000 |
| 9888528 |
Substrate support with multiple heating zones |
Tomoharu Matsushita, Jallepally Ravi, Cheng-Hsiung Tsai, Aravind Kamath, Xiaoxiong Yuan |
2018-02-06 |
$31,277,000 |
| 9613846 |
Pad design for electrostatic chuck surface |
Govinda Raj, Cheng-Hsiung Tsai, Robert T. Hirahara, Kadthala Ramaya Narendrnath, Ross Marshall |
2017-04-04 |
$16,159,000 |
