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Substrate chucking and dechucking methods |
Wendell Glenn Boyd, Jr., Jim Zhongyi He, Ramesh Gopalan, Govinda Raj |
2021-09-07 |
| 11054317 |
Method and apparatus for direct measurement of chucking force on an electrostatic chuck |
Charles G. Potter, Wendell Glenn Boyd, Jr., Govinda Raj |
2021-07-06 |
| 10347522 |
Method to remove residual charge on a electrostatic chuck during the de-chucking step |
Wendell Glen Boyd, Jr., Tom K. Cho |
2019-07-09 |
| 10177014 |
Thermal radiation barrier for substrate processing chamber components |
Govinda Raj, Daniel L. Martin, Ashish Bhatnagar, Bopanna Vasanth, Prashanth Rao +1 more |
2019-01-08 |
| 10049908 |
Methods and apparatus for electrostatic chuck repair and refurbishment |
Govinda Raj |
2018-08-14 |
| 9917001 |
High temperature fine grain aluminum heater |
Abhi Desai, Calvin Augason |
2018-03-13 |
| 9865489 |
Substrate support chuck cooling for deposition chamber |
Brian T. West, Vijay D. Parkhe, Dan DEYO |
2018-01-09 |
| 9668373 |
Substrate support chuck cooling for deposition chamber |
Brian T. West, Vijay D. Parkhe, Dan DEYO |
2017-05-30 |
| 9613846 |
Pad design for electrostatic chuck surface |
Govinda Raj, Cheng-Hsiung Tsai, Kadthala Ramaya Narendrnath, Manjunatha Koppa, Ross Marshall |
2017-04-04 |
| 9349630 |
Methods and apparatus for electrostatic chuck repair and refurbishment |
Govinda Raj |
2016-05-24 |
| 8464594 |
Measuring flow properties of multiple gas nozzles of a gas distributor |
Kadthala Ramaya Narendrnath, Ashish Bhatnagar, Daniel L. Martin, Gangadhar Sheelavant |
2013-06-18 |
| 8320099 |
Electrostatic chuck electrical balancing circuit repair |
Vijay D. Parkhe |
2012-11-27 |
| 8064185 |
Electrostatic chuck electrical balancing circuit repair |
Vijay D. Parkhe |
2011-11-22 |
