Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114326 | Substrate chucking and dechucking methods | Wendell Glenn Boyd, Jr., Jim Zhongyi He, Ramesh Gopalan, Govinda Raj | 2021-09-07 |
| 11054317 | Method and apparatus for direct measurement of chucking force on an electrostatic chuck | Charles G. Potter, Wendell Glenn Boyd, Jr., Govinda Raj | 2021-07-06 |
| 10347522 | Method to remove residual charge on a electrostatic chuck during the de-chucking step | Wendell Glen Boyd, Jr., Tom K. Cho | 2019-07-09 |
| 10177014 | Thermal radiation barrier for substrate processing chamber components | Govinda Raj, Daniel L. Martin, Ashish Bhatnagar, Bopanna Vasanth, Prashanth Rao +1 more | 2019-01-08 |
| 10049908 | Methods and apparatus for electrostatic chuck repair and refurbishment | Govinda Raj | 2018-08-14 |
| 9917001 | High temperature fine grain aluminum heater | Abhi Desai, Calvin Augason | 2018-03-13 |
| 9865489 | Substrate support chuck cooling for deposition chamber | Brian T. West, Vijay D. Parkhe, Dan DEYO | 2018-01-09 |
| 9668373 | Substrate support chuck cooling for deposition chamber | Brian T. West, Vijay D. Parkhe, Dan DEYO | 2017-05-30 |
| 9613846 | Pad design for electrostatic chuck surface | Govinda Raj, Cheng-Hsiung Tsai, Kadthala Ramaya Narendrnath, Manjunatha Koppa, Ross Marshall | 2017-04-04 |
| 9349630 | Methods and apparatus for electrostatic chuck repair and refurbishment | Govinda Raj | 2016-05-24 |
| 8464594 | Measuring flow properties of multiple gas nozzles of a gas distributor | Kadthala Ramaya Narendrnath, Ashish Bhatnagar, Daniel L. Martin, Gangadhar Sheelavant | 2013-06-18 |
| 8320099 | Electrostatic chuck electrical balancing circuit repair | Vijay D. Parkhe | 2012-11-27 |
| 8064185 | Electrostatic chuck electrical balancing circuit repair | Vijay D. Parkhe | 2011-11-22 |