Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872749 | Textured skin for chamber components | Cariappa Baduvamanda, Kaushik Vaidya, Bopanna Ichettira VASANTHA | 2020-12-22 |
| 10513008 | Chemical mechanical polishing smart ring | Zubin Huang, Stephen A. Wells, Ramesh Gopalan, Simon Yavelberg | 2019-12-24 |
| 10435784 | Thermally optimized rings | Cariappa Baduvamanda, Bopanna Ichettira VASANTHA | 2019-10-08 |
| 10399202 | Retaining ring for lower wafer defects | Yongqi Hu, Simon Yavelberg, Kadthala Ramaya Narendrnath | 2019-09-03 |
| 10403521 | Modular substrate heater for efficient thermal cycling | Cariappa Baduvamanda | 2019-09-03 |
| 10131126 | Methods for bonding substrates | Kadthala Ramaya Narendrnath, Monika Agarwal, Ashish Bhatnagar | 2018-11-20 |
| 10041842 | Method for measuring temperature by refraction and change in velocity of waves with magnetic susceptibility | — | 2018-08-07 |
| 9799548 | Susceptors for enhanced process uniformity and reduced substrate slippage | Mahadev Joshi, Yuji Aoki | 2017-10-24 |
| 9744640 | Corrosion resistant retaining rings | Simon Yavelberg, Yongqi Hu | 2017-08-29 |
| 9627231 | Methods for bonding substrates | Kadthala Ramaya Narendrnath, Monika Agarwal, Ashish Bhatnagar | 2017-04-18 |
| 8464594 | Measuring flow properties of multiple gas nozzles of a gas distributor | Kadthala Ramaya Narendrnath, Ashish Bhatnagar, Daniel L. Martin, Robert T. Hirahara | 2013-06-18 |