Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569069 | 3D printed chamber components configured for lower film stress and lower operating temperature | Kadthala Ramaya Narendrnath, Govinda Raj, Goichi Yoshidome, Umesh M. Kelkar | 2023-01-31 |
| 11417561 | Edge ring for a substrate processing chamber | Govinda Raj, Kadthala Ramaya Narendrnath, Simon Yavelberg | 2022-08-16 |
| 10872749 | Textured skin for chamber components | Gangadhar Sheelavant, Cariappa Baduvamanda, Kaushik Vaidya | 2020-12-22 |
| 10777391 | 3D printed chamber components configured for lower film stress and lower operating temperature | Kadthala Ramaya Narendrnath, Govinda Raj, Goichi Yoshidome, Umesh M. Kelkar | 2020-09-15 |
| 10553473 | Edge ring for a substrate processing chamber | Govinda Raj, Kadthala Ramaya Narendrnath, Simon Yavelberg | 2020-02-04 |
| 10435784 | Thermally optimized rings | Gangadhar Sheelavant, Cariappa Baduvamanda | 2019-10-08 |