Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9917001 | High temperature fine grain aluminum heater | Robert T. Hirahara, Calvin Augason | 2018-03-13 |
| 6192829 | Antenna coil assemblies for substrate processing chambers | Michael P. Karazim, Tetsuya Ishikawa, Rudolf Gujer, Thomas Kring, Pavel Staryuk +2 more | 2001-02-27 |