Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11637004 | Alignment module with a cleaning chamber | Alexander Lerner, Andrew J. Constant, Jeffrey A. Brodine, Kim Vellore, Kevin Moraes +1 more | 2023-04-25 |
| 11538706 | System and method for aligning a mask with a substrate | Alexander Lerner, Andrew J. Constant, Jeffrey A. Brodine, Kim Vellore, Kevin Moraes +1 more | 2022-12-27 |
| 11469124 | Contactless latch and coupling for vacuum wafer transfer cassette | Shreyas Patil Shanthaveeraswamy, Ribhu Gautam, Kumaresan Nagarajan, Vijay Singh, Andrew J. Constant +1 more | 2022-10-11 |
| 11414740 | Processing system for forming layers | Alexander Lerner, Roey Shaviv, Kevin Moraes, Steven V. Sansoni, Andrew J. Constant +4 more | 2022-08-16 |
| 11047039 | Substrate carrier having hard mask | Alexander Lerner, Kim Vellore, Ami Sade, Steven V. Sansoni, Andrew J. Constant +4 more | 2021-06-29 |
| 10517146 | Internal chamber rotation motor, alternative rotation | — | 2019-12-24 |
| 9837250 | Hot wall reactor with cooled vacuum containment | Joel M. Huston, Olkan Cuvalci, Joseph Yudovsky | 2017-12-05 |
| 9783889 | Apparatus for variable substrate temperature control | Gwo-Chuan Tzu, Xiaoxiong Yuan, Amit Khandelwal, Avgerinos V. Gelatos, Olkan Cuvalci +1 more | 2017-10-10 |
| 9394938 | Internal chamber rotation motor, alternative rotation | — | 2016-07-19 |
| 8920564 | Methods and apparatus for thermal based substrate processing with variable temperature capability | Gwo-Chuan Tzu, Xiaoxiong Yuan, Amit Khandelwal, Benjamin C. Wang, Avgerinos V. Gelatos +3 more | 2014-12-30 |
| 6958098 | Semiconductor wafer support lift-pin assembly | Rudolf Gujer, Thomas Cho, Lily Pang, Tetsuya Ishikawa | 2005-10-25 |
| 6648588 | Multiple sided robot blade for semiconductor processing equipment | Arul Shanmugasundram | 2003-11-18 |
| 6572708 | Semiconductor wafer support lift-pin assembly | Rudolf Gujer, Thomas Cho, Lily Pang, Tetsuya Ishikawa | 2003-06-03 |
| 6481951 | Multiple sided robot blade for semiconductor processing equipment | Arul Shanmugasundram | 2002-11-19 |
| 6192829 | Antenna coil assemblies for substrate processing chambers | Tetsuya Ishikawa, Rudolf Gujer, Thomas Kring, Pavel Staryuk, Abhi Desai +2 more | 2001-02-27 |
| 4499691 | Jet pump beam bolt retainer cutter | Bob Y. Okashima, John J. Ashburn | 1985-02-19 |