| 11860528 |
Multi-chamber substrate processing platform |
Vibhu Jindal, Sanjay Bhat, Praveen Kumar Choragudi, Vinodh Ramachandran, Arun Rengaraj |
2024-01-02 |
| 11784075 |
Batch substrate support with warped substrate capability |
Shashidhara Patel, Ananthkrishna Jupudi |
2023-10-10 |
| 11767484 |
Bio-lubricant with high viscosity and method |
Tsu-fang HONG, Subram Maniam SARATHY |
2023-09-26 |
| 11699634 |
Water cooled plate for heat management in power amplifiers |
Ananthkrishna Jupudi, Vinodh Ramachandran |
2023-07-11 |
| 11670525 |
Methods and apparatus for microwave leakage reduction for semiconductor process chambers |
Preetham Rao, Ananthkrishna Jupudi |
2023-06-06 |
| 11629409 |
Inline microwave batch degas chamber |
Ananthkrishna Jupudi, Tuck Foong Koh, Preetham Rao, Vinodh Ramachandran, Yueh Sheng Ow +3 more |
2023-04-18 |
| 11480866 |
Method and apparatus to anneal EUV mask blank |
Herng Yau Yoong, Wen Xiao, Sanjay Bhat, Vibhu Jindal |
2022-10-25 |
| 11469124 |
Contactless latch and coupling for vacuum wafer transfer cassette |
Shreyas Patil Shanthaveeraswamy, Kumaresan Nagarajan, Vijay Singh, Andrew J. Constant, Michael P. Karazim +1 more |
2022-10-11 |
| 11361981 |
Batch substrate support with warped substrate capability |
Shashidhara Patel, Ananthkrishna Jupudi |
2022-06-14 |
| 10950475 |
Method and apparatus for processing a substrate using non-contact temperature measurement |
Vinodh Ramachandran, Ananthkrishna Jupudi, Cheng-Hsiung Tsai, Yueh Sheng Ow, Preetham Rao +1 more |
2021-03-16 |
