Issued Patents All Time
Showing 25 most recent of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237186 | On-board cleaning of tooling parts in hybrid bonding tool | Ruiping Wang, Ying Wang, Guan Huei See, Praveen Kumar Choragudi | 2025-02-25 |
| 12148629 | Shutter disk | Kang Zhang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2024-11-19 |
| 12100577 | High conductance inner shield for process chamber | Sarath Babu, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2024-09-24 |
| 12080522 | Preclean chamber upper shield with showerhead | Sarath Babu, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Kang Zhang +1 more | 2024-09-03 |
| 11929260 | Low warpage curing methodology by inducing curvature | Fang Jie Lim, Chin Wei Tan, Jun-Liang Su, Felix Deng, Sai Kumar Kodumuri +1 more | 2024-03-12 |
| 11881385 | Methods and apparatus for reducing defects in preclean chambers | Yueh Sheng Ow, Yuichi Wada, Junqi Wei, Kang Zhang, Sarath Babu +2 more | 2024-01-23 |
| 11870202 | Solid-state power amplifiers with cooling capabilities | Rajesh Kumar Putti, Vinodh Ramachandran, Lean Wui Koh, Prashant Agarwal | 2024-01-09 |
| 11862480 | Shutter disk | Kang Zhang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2024-01-02 |
| 11784075 | Batch substrate support with warped substrate capability | Shashidhara Patel, Ribhu Gautam | 2023-10-10 |
| 11699634 | Water cooled plate for heat management in power amplifiers | Ribhu Gautam, Vinodh Ramachandran | 2023-07-11 |
| 11670513 | Apparatus and systems for substrate processing for lowering contact resistance | Yueh Sheng Ow, Junqi Wei, Wen Long Favier Shoo, Takashi Shimizu, Kelvin Boh +1 more | 2023-06-06 |
| 11670525 | Methods and apparatus for microwave leakage reduction for semiconductor process chambers | Preetham Rao, Ribhu Gautam | 2023-06-06 |
| 11630001 | Apparatus for measuring temperature in a vacuum and microwave environment | Sai Kumar Kodumuri, Vinodh Ramachandran, Prashant Agarwal, Hadi Bin Amir Muhammad | 2023-04-18 |
| 11629409 | Inline microwave batch degas chamber | Ribhu Gautam, Tuck Foong Koh, Preetham Rao, Vinodh Ramachandran, Yueh Sheng Ow +3 more | 2023-04-18 |
| D973609 | Upper shield with showerhead for a process chamber | Sarath Babu, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Kang Zhang +1 more | 2022-12-27 |
| D971167 | Lower shield for a substrate processing chamber | Sarath Babu, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2022-11-29 |
| 11476097 | Common electrostatic chuck for differing substrates | Vinodh Ramachandran, Sarath Babu | 2022-10-18 |
| D967081 | Microwave transmission window assembly | Rajesh Kumar Putti, Prashant Agarwal | 2022-10-18 |
| 11375584 | Methods and apparatus for processing a substrate using microwave energy | Tuck Foong Koh, Yueh Sheng Ow, Nuno Yen-Chu Chen, Preetham Rao | 2022-06-28 |
| 11362404 | Microwave window including first and second plates with vertical stepped areas configured for pressure sealing a dielectric plate between the first and second plates | Rajesh Kumar Putti, Prashant Agarwal | 2022-06-14 |
| 11361981 | Batch substrate support with warped substrate capability | Shashidhara Patel, Ribhu Gautam | 2022-06-14 |
| 11328929 | Methods, apparatuses and systems for substrate processing for lowering contact resistance | Yueh Sheng Ow, Junqi Wei, Wen Long Favier Shoo, Takashi Shimizu, Kelvin Boh +1 more | 2022-05-10 |
| 11289357 | Methods and apparatus for high voltage electrostatic chuck protection | Yuichi Wada, Yueh Sheng Ow, Clinton GOH, Kai Liang Liew, Sarath Babu | 2022-03-29 |
| 11251028 | Pre-clean chamber with integrated shutter garage | Cheng-Hsiung Tsai, Sarath Babu, Manjunatha Koppa, Hiroyuki Takahama | 2022-02-15 |
| 11171017 | Shutter disk | Zhang Kang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2021-11-09 |