Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148629 | Shutter disk | Kang Zhang, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2024-11-19 |
| 12100577 | High conductance inner shield for process chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2024-09-24 |
| 12080522 | Preclean chamber upper shield with showerhead | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Kelvin Boh, Kang Zhang +1 more | 2024-09-03 |
| 11913107 | Methods and apparatus for processing a substrate | Yueh Sheng Ow, Yuichi Wada, Kang Zhang, Kelvin Boh | 2024-02-27 |
| 11881385 | Methods and apparatus for reducing defects in preclean chambers | Yueh Sheng Ow, Yuichi Wada, Kang Zhang, Ananthkrishna Jupudi, Sarath Babu +2 more | 2024-01-23 |
| 11862480 | Shutter disk | Kang Zhang, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2024-01-02 |
| 11670513 | Apparatus and systems for substrate processing for lowering contact resistance | Yueh Sheng Ow, Wen Long Favier Shoo, Ananthkrishna Jupudi, Takashi Shimizu, Kelvin Boh +1 more | 2023-06-06 |
| D973609 | Upper shield with showerhead for a process chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Kelvin Boh, Kang Zhang +1 more | 2022-12-27 |
| D971167 | Lower shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2022-11-29 |
| 11328929 | Methods, apparatuses and systems for substrate processing for lowering contact resistance | Yueh Sheng Ow, Wen Long Favier Shoo, Ananthkrishna Jupudi, Takashi Shimizu, Kelvin Boh +1 more | 2022-05-10 |
| 11171017 | Shutter disk | Zhang Kang, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2021-11-09 |
| D931241 | Lower shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2021-09-21 |
| 11114288 | Physical vapor deposition apparatus | Kirankumar Neelasandra SAVANDAIAH, Yueh Sheng Ow, Wen Long Favier Shoo | 2021-09-07 |
| D913979 | Inner shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2021-03-23 |
| 10115573 | Apparatus for high compressive stress film deposition to improve kit life | Kirankumar Neelasandra SAVANDAIAH, Ananthkrishna Jupudi, Zhitao Cao, Yueh Sheng Ow | 2018-10-30 |
| 9960023 | Methods and apparatus for nodule control in a titanium-tungsten target | Zhitao Cao, Yueh Sheng Ow, Ananthkrishna Jupudi, Kirankumar Neelasandra SAVANDAIAH, Xin Wang +1 more | 2018-05-01 |