Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148629 | Shutter disk | Kang Zhang, Junqi Wei, Kelvin Boh, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2024-11-19 |
| 12100577 | High conductance inner shield for process chamber | Sarath Babu, Ananthkrishna Jupudi, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2024-09-24 |
| 12080522 | Preclean chamber upper shield with showerhead | Sarath Babu, Ananthkrishna Jupudi, Junqi Wei, Kelvin Boh, Kang Zhang +1 more | 2024-09-03 |
| 12074400 | Substrate dimension adapter | Mayeul Durand de Gevigney, Christophe Isnard | 2024-08-27 |
| 12048948 | Methods for forming microwave tunable composited thin-film dielectric layer | Yue Cui, Arvind Sundarrajan, Nuno Yen-Chu Chen, Guan Huei See, Felix Deng | 2024-07-30 |
| 11913107 | Methods and apparatus for processing a substrate | Yuichi Wada, Junqi Wei, Kang Zhang, Kelvin Boh | 2024-02-27 |
| 11881385 | Methods and apparatus for reducing defects in preclean chambers | Yuichi Wada, Junqi Wei, Kang Zhang, Ananthkrishna Jupudi, Sarath Babu +2 more | 2024-01-23 |
| 11862480 | Shutter disk | Kang Zhang, Junqi Wei, Kelvin Boh, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2024-01-02 |
| 11670513 | Apparatus and systems for substrate processing for lowering contact resistance | Junqi Wei, Wen Long Favier Shoo, Ananthkrishna Jupudi, Takashi Shimizu, Kelvin Boh +1 more | 2023-06-06 |
| 11629409 | Inline microwave batch degas chamber | Ribhu Gautam, Ananthkrishna Jupudi, Tuck Foong Koh, Preetham Rao, Vinodh Ramachandran +3 more | 2023-04-18 |
| 11610807 | Methods and apparatus for cleaving of semiconductor substrates | Felix Deng, Tuck Foong Koh, Nuno Yen-Chu Chen, Yuichi Wada, Sree Rangasai V. Kesapragada +1 more | 2023-03-21 |
| 11569122 | Methods and apparatus for cleaving of semiconductor substrates | Felix Deng, Tuck Foong Koh, Nuno Yen-Chu Chen, Yuichi Wada, Sree Rangasai V. Kesapragada +1 more | 2023-01-31 |
| D973609 | Upper shield with showerhead for a process chamber | Sarath Babu, Ananthkrishna Jupudi, Junqi Wei, Kelvin Boh, Kang Zhang +1 more | 2022-12-27 |
| D971167 | Lower shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2022-11-29 |
| 11375584 | Methods and apparatus for processing a substrate using microwave energy | Tuck Foong Koh, Nuno Yen-Chu Chen, Ananthkrishna Jupudi, Preetham Rao | 2022-06-28 |
| 11328929 | Methods, apparatuses and systems for substrate processing for lowering contact resistance | Junqi Wei, Wen Long Favier Shoo, Ananthkrishna Jupudi, Takashi Shimizu, Kelvin Boh +1 more | 2022-05-10 |
| 11289357 | Methods and apparatus for high voltage electrostatic chuck protection | Yuichi Wada, Ananthkrishna Jupudi, Clinton GOH, Kai Liang Liew, Sarath Babu | 2022-03-29 |
| 11171017 | Shutter disk | Zhang Kang, Junqi Wei, Kelvin Boh, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2021-11-09 |
| D931241 | Lower shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2021-09-21 |
| 11114288 | Physical vapor deposition apparatus | Kirankumar Neelasandra SAVANDAIAH, Junqi Wei, Wen Long Favier Shoo | 2021-09-07 |
| 10991617 | Methods and apparatus for cleaving of semiconductor substrates | Felix Deng, Tuck Foong Koh, Nuno Yen-Chu Chen, Yuichi Wada, Sree Rangasai V. Kesapragada +1 more | 2021-04-27 |
| D913979 | Inner shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2021-03-23 |
| 10950475 | Method and apparatus for processing a substrate using non-contact temperature measurement | Vinodh Ramachandran, Ananthkrishna Jupudi, Cheng-Hsiung Tsai, Preetham Rao, Ribhu Gautam +1 more | 2021-03-16 |
| 10677830 | Methods and apparatus for detecting microwave fields in a cavity | Ananthkrishna Jupudi, Jacob Newman, Preetham Rao, Yuichi Wada, Vinodh Ramachandran | 2020-06-09 |
| 10629430 | Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications | Loke Yuen Wong, Ke Chang, Ananthkrishna Jupudi, Glen T. Mori, Aksel Kitowski +1 more | 2020-04-21 |