Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131105 | Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensing | Prashanth Kothnur | 2024-10-29 |
| 11978646 | Thermal chamber with improved thermal uniformity | Dongming Iu, Kartik Shah, Norman L. Tam, Matthew Spuller, Jau-Jiun CHEN +4 more | 2024-05-07 |
| 11807931 | Chamber injector | Shu-Kwan LAU, Lit Ping LAM, Kartik Shah, Ian Ong, Nyi O. Myo +1 more | 2023-11-07 |
| 11670525 | Methods and apparatus for microwave leakage reduction for semiconductor process chambers | Ananthkrishna Jupudi, Ribhu Gautam | 2023-06-06 |
| 11629409 | Inline microwave batch degas chamber | Ribhu Gautam, Ananthkrishna Jupudi, Tuck Foong Koh, Vinodh Ramachandran, Yueh Sheng Ow +3 more | 2023-04-18 |
| 11492699 | Substrate temperature non-uniformity reduction over target life using spacing compensation | Suhas Bangalore Umesh, Shirish A. PETHE, Fuhong Zhang, Kishor Kalathiparambil, Martin Lee Riker +1 more | 2022-11-08 |
| 11492704 | Chamber injector | Shu-Kwan LAU, Lit Ping LAM, Kartik Shah, Ian Ong, Nyi O. Myo +1 more | 2022-11-08 |
| 11375584 | Methods and apparatus for processing a substrate using microwave energy | Tuck Foong Koh, Yueh Sheng Ow, Nuno Yen-Chu Chen, Ananthkrishna Jupudi | 2022-06-28 |
| 11171023 | Diode laser for wafer heating for EPI processes | Schubert S. Chu, Douglas E. Holmgren, Kartik Shah, Palamurali GAJENDRA, Nyi O. Myo +5 more | 2021-11-09 |
| 11021794 | Graphite susceptor | Subramani Iyer, Kartik Shah, Mehran Behdjat | 2021-06-01 |
| 10971383 | Fluorescence based thermometry for packaging applications | Ananthkrishna Jupudi | 2021-04-06 |
| 10950475 | Method and apparatus for processing a substrate using non-contact temperature measurement | Vinodh Ramachandran, Ananthkrishna Jupudi, Cheng-Hsiung Tsai, Yueh Sheng Ow, Ribhu Gautam +1 more | 2021-03-16 |
| 10677830 | Methods and apparatus for detecting microwave fields in a cavity | Ananthkrishna Jupudi, Yueh Sheng Ow, Jacob Newman, Yuichi Wada, Vinodh Ramachandran | 2020-06-09 |
| 10600664 | Fluorescence based thermometry for packaging applications | Ananthkrishna Jupudi | 2020-03-24 |
| 10455642 | Rapid thermal processing chamber with linear control lamps | Abhilash J. Mayur | 2019-10-22 |
| 10000847 | Graphite susceptor | Subramani Iyer, Kartik Shah, Mehran Behdjat | 2018-06-19 |