| 12131105 |
Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensing |
Prashanth Kothnur |
2024-10-29 |
| 11978646 |
Thermal chamber with improved thermal uniformity |
Dongming Iu, Kartik Shah, Norman L. Tam, Matthew Spuller, Jau-Jiun CHEN +4 more |
2024-05-07 |
| 11807931 |
Chamber injector |
Shu-Kwan LAU, Lit Ping LAM, Kartik Shah, Ian Ong, Nyi O. Myo +1 more |
2023-11-07 |
| 11670525 |
Methods and apparatus for microwave leakage reduction for semiconductor process chambers |
Ananthkrishna Jupudi, Ribhu Gautam |
2023-06-06 |
| 11629409 |
Inline microwave batch degas chamber |
Ribhu Gautam, Ananthkrishna Jupudi, Tuck Foong Koh, Vinodh Ramachandran, Yueh Sheng Ow +3 more |
2023-04-18 |
| 11492699 |
Substrate temperature non-uniformity reduction over target life using spacing compensation |
Suhas Bangalore Umesh, Shirish A. PETHE, Fuhong Zhang, Kishor Kalathiparambil, Martin Lee Riker +1 more |
2022-11-08 |
| 11492704 |
Chamber injector |
Shu-Kwan LAU, Lit Ping LAM, Kartik Shah, Ian Ong, Nyi O. Myo +1 more |
2022-11-08 |
| 11375584 |
Methods and apparatus for processing a substrate using microwave energy |
Tuck Foong Koh, Yueh Sheng Ow, Nuno Yen-Chu Chen, Ananthkrishna Jupudi |
2022-06-28 |
| 11171023 |
Diode laser for wafer heating for EPI processes |
Schubert S. Chu, Douglas E. Holmgren, Kartik Shah, Palamurali GAJENDRA, Nyi O. Myo +5 more |
2021-11-09 |
| 11021794 |
Graphite susceptor |
Subramani Iyer, Kartik Shah, Mehran Behdjat |
2021-06-01 |
| 10971383 |
Fluorescence based thermometry for packaging applications |
Ananthkrishna Jupudi |
2021-04-06 |
| 10950475 |
Method and apparatus for processing a substrate using non-contact temperature measurement |
Vinodh Ramachandran, Ananthkrishna Jupudi, Cheng-Hsiung Tsai, Yueh Sheng Ow, Ribhu Gautam +1 more |
2021-03-16 |
| 10677830 |
Methods and apparatus for detecting microwave fields in a cavity |
Ananthkrishna Jupudi, Yueh Sheng Ow, Jacob Newman, Yuichi Wada, Vinodh Ramachandran |
2020-06-09 |
| 10600664 |
Fluorescence based thermometry for packaging applications |
Ananthkrishna Jupudi |
2020-03-24 |
| 10455642 |
Rapid thermal processing chamber with linear control lamps |
Abhilash J. Mayur |
2019-10-22 |
| 10000847 |
Graphite susceptor |
Subramani Iyer, Kartik Shah, Mehran Behdjat |
2018-06-19 |
