Issued Patents All Time
Showing 25 most recent of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400904 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2025-08-26 |
| 12371776 | Overlap susceptor and preheat ring | Zhepeng CONG, Nyi O. Myo, Kartik Shah, Zhiyuan Ye, Richard O. Collins | 2025-07-29 |
| 12338547 | Method for forming silicon-phosphorous materials | Errol Antonio C. Sanchez, Mark Saly, Abhishek Dube, Srividya Natarajan | 2025-06-24 |
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG +10 more | 2025-01-14 |
| 12170196 | Methods and systems for cleaning high aspect ratio structures | Errol Antonio C. Sanchez | 2024-12-17 |
| 12163229 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2024-12-10 |
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG +10 more | 2024-12-10 |
| 12125698 | Integrated epitaxy and preclean system | Lara Hawrylchak, Tushar Mandrekar, Errol C. Sanchez, Kin Pong Lo | 2024-10-22 |
| 12037701 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Zhiyuan Ye, Shu-Kwan LAU, Brian H. Burrows, Lori D. Washington, Herman Diniz +4 more | 2024-07-16 |
| 12015042 | Structure and material engineering methods for optoelectronic devices signal to noise ratio enhancement | Papo CHEN, Errol Antonio C. Sanchez, John Boland, Zhiyuan Ye, Lori D. Washington +3 more | 2024-06-18 |
| 11996307 | Semiconductor processing tool platform configuration with reduced footprint | Nir Merry, Sushant S. Koshti, Michael Kuchar, Nyi O. Myo, Songjae Lee | 2024-05-28 |
| 11946135 | Low temperature deposition of iridium containing films | Feng Q. Liu, Hua Chung, Mei Chang, Jeffrey W. Anthis, David Thompson | 2024-04-02 |
| 11848226 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2023-12-19 |
| 11821088 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2023-11-21 |
| 11815401 | Temperature calibration with band gap absorption method | Zhepeng CONG, Nyi O. Myo | 2023-11-14 |
| 11781212 | Overlap susceptor and preheat ring | Zhepeng CONG, Nyi O. Myo, Kartik Shah, Zhiyuan Ye, Richard O. Collins | 2023-10-10 |
| 11649559 | Method of utilizing a degassing chamber to reduce arsenic outgassing following deposition of arsenic-containing material on a substrate | Xinyu BAO, Chun Yan, Hua Chung | 2023-05-16 |
| 11649560 | Method for forming silicon-phosphorous materials | Errol Antonio C. Sanchez, Mark Saly, Abhishek Dube, Srividya Natarajan | 2023-05-16 |
| 11643721 | Low temperature deposition of iridium containing films | Feng Q. Liu, Hua Chung, Mei Chang, Jeffrey W. Anthis, David Thompson | 2023-05-09 |
| 11615986 | Methods and apparatus for metal silicide deposition | Xuebin Li, Wei Liu, Gaurav Thareja, Shashank Sharma, Patricia M. Liu | 2023-03-28 |
| 11605544 | Methods and systems for cleaning high aspect ratio structures | Errol Antonio C. SANCHEZ | 2023-03-14 |
| 11411039 | Stacked pixel structure formed using epitaxy | Papo CHEN, John Boland, Errol Antonio C. Sanchez, Stephen Moffatt | 2022-08-09 |
| 11359972 | Temperature calibration with band gap absorption method | Zhepeng CONG, Nyi O. Myo | 2022-06-14 |
| 11189508 | Purged viewport for quartz dome in epitaxy reactor | Ji-Dih HU, Brian H. Burrows, Janardhan Devrajan | 2021-11-30 |
| 11177144 | Wafer spot heating with beam width modulation | Shu-Kwan LAU, Zhiyuan Ye, Zuoming ZHU, Koji Nakanishi, Toshiyuki Nakagawa +1 more | 2021-11-16 |