SC

Schubert S. Chu

Applied Materials: 78 patents #70 of 7,310Top 1%
Overall (All Time): #23,442 of 4,157,543Top 1%
78
Patents All Time

Issued Patents All Time

Showing 25 most recent of 78 patents

Patent #TitleCo-InventorsDate
12400904 Thermal processing susceptor Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more 2025-08-26
12371776 Overlap susceptor and preheat ring Zhepeng CONG, Nyi O. Myo, Kartik Shah, Zhiyuan Ye, Richard O. Collins 2025-07-29
12338547 Method for forming silicon-phosphorous materials Errol Antonio C. Sanchez, Mark Saly, Abhishek Dube, Srividya Natarajan 2025-06-24
12196617 Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG +10 more 2025-01-14
12170196 Methods and systems for cleaning high aspect ratio structures Errol Antonio C. Sanchez 2024-12-17
12163229 Multi zone spot heating in EPI Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more 2024-12-10
12165934 Substrate processing monitoring Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG +10 more 2024-12-10
12125698 Integrated epitaxy and preclean system Lara Hawrylchak, Tushar Mandrekar, Errol C. Sanchez, Kin Pong Lo 2024-10-22
12037701 Multi-thermal CVD chambers with shared gas delivery and exhaust system Zhiyuan Ye, Shu-Kwan LAU, Brian H. Burrows, Lori D. Washington, Herman Diniz +4 more 2024-07-16
12015042 Structure and material engineering methods for optoelectronic devices signal to noise ratio enhancement Papo CHEN, Errol Antonio C. Sanchez, John Boland, Zhiyuan Ye, Lori D. Washington +3 more 2024-06-18
11996307 Semiconductor processing tool platform configuration with reduced footprint Nir Merry, Sushant S. Koshti, Michael Kuchar, Nyi O. Myo, Songjae Lee 2024-05-28
11946135 Low temperature deposition of iridium containing films Feng Q. Liu, Hua Chung, Mei Chang, Jeffrey W. Anthis, David Thompson 2024-04-02
11848226 Thermal processing susceptor Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more 2023-12-19
11821088 Multi zone spot heating in EPI Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more 2023-11-21
11815401 Temperature calibration with band gap absorption method Zhepeng CONG, Nyi O. Myo 2023-11-14
11781212 Overlap susceptor and preheat ring Zhepeng CONG, Nyi O. Myo, Kartik Shah, Zhiyuan Ye, Richard O. Collins 2023-10-10
11649559 Method of utilizing a degassing chamber to reduce arsenic outgassing following deposition of arsenic-containing material on a substrate Xinyu BAO, Chun Yan, Hua Chung 2023-05-16
11649560 Method for forming silicon-phosphorous materials Errol Antonio C. Sanchez, Mark Saly, Abhishek Dube, Srividya Natarajan 2023-05-16
11643721 Low temperature deposition of iridium containing films Feng Q. Liu, Hua Chung, Mei Chang, Jeffrey W. Anthis, David Thompson 2023-05-09
11615986 Methods and apparatus for metal silicide deposition Xuebin Li, Wei Liu, Gaurav Thareja, Shashank Sharma, Patricia M. Liu 2023-03-28
11605544 Methods and systems for cleaning high aspect ratio structures Errol Antonio C. SANCHEZ 2023-03-14
11411039 Stacked pixel structure formed using epitaxy Papo CHEN, John Boland, Errol Antonio C. Sanchez, Stephen Moffatt 2022-08-09
11359972 Temperature calibration with band gap absorption method Zhepeng CONG, Nyi O. Myo 2022-06-14
11189508 Purged viewport for quartz dome in epitaxy reactor Ji-Dih HU, Brian H. Burrows, Janardhan Devrajan 2021-11-30
11177144 Wafer spot heating with beam width modulation Shu-Kwan LAU, Zhiyuan Ye, Zuoming ZHU, Koji Nakanishi, Toshiyuki Nakagawa +1 more 2021-11-16