| 12449309 |
Methods for detection using optical emission spectroscopy |
Zuoming ZHU, Martin A. Hilkene, Avinash Shervegar, Surendra Singh SRIVASTAVA, Ala Moradian +9 more |
2025-10-21 |
|
| 12400904 |
Thermal processing susceptor |
Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more |
2025-08-26 |
|
| 12371776 |
Overlap susceptor and preheat ring |
Zhepeng CONG, Nyi O. Myo, Kartik Shah, Zhiyuan Ye, Richard O. Collins |
2025-07-29 |
|
| 12338547 |
Method for forming silicon-phosphorous materials |
Errol Antonio C. Sanchez, Mark Saly, Abhishek Dube, Srividya Natarajan |
2025-06-24 |
|
| 12196617 |
Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber |
Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG +10 more |
2025-01-14 |
|
| 12170196 |
Methods and systems for cleaning high aspect ratio structures |
Errol Antonio C. Sanchez |
2024-12-17 |
$116,184,000 |
| 12163229 |
Multi zone spot heating in EPI |
Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more |
2024-12-10 |
$69,596,000 |
| 12165934 |
Substrate processing monitoring |
Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG +10 more |
2024-12-10 |
$69,596,000 |
| 12125698 |
Integrated epitaxy and preclean system |
Lara Hawrylchak, Tushar Mandrekar, Errol C. Sanchez, Kin Pong Lo |
2024-10-22 |
$83,950,000 |
| 12037701 |
Multi-thermal CVD chambers with shared gas delivery and exhaust system |
Zhiyuan Ye, Shu-Kwan LAU, Brian H. Burrows, Lori D. Washington, Herman Diniz +4 more |
2024-07-16 |
$116,305,000 |
| 12015042 |
Structure and material engineering methods for optoelectronic devices signal to noise ratio enhancement |
Papo CHEN, Errol Antonio C. Sanchez, John Boland, Zhiyuan Ye, Lori D. Washington +3 more |
2024-06-18 |
$83,264,000 |
| 11996307 |
Semiconductor processing tool platform configuration with reduced footprint |
Nir Merry, Sushant S. Koshti, Michael Kuchar, Nyi O. Myo, Songjae Lee |
2024-05-28 |
$67,076,000 |
| 11946135 |
Low temperature deposition of iridium containing films |
Feng Q. Liu, Hua Chung, Mei Chang, Jeffrey W. Anthis, David Thompson |
2024-04-02 |
$42,223,000 |
| 11848226 |
Thermal processing susceptor |
Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more |
2023-12-19 |
$56,890,000 |
| 11821088 |
Multi zone spot heating in EPI |
Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more |
2023-11-21 |
$39,416,000 |
| 11815401 |
Temperature calibration with band gap absorption method |
Zhepeng CONG, Nyi O. Myo |
2023-11-14 |
$33,075,000 |
| 11781212 |
Overlap susceptor and preheat ring |
Zhepeng CONG, Nyi O. Myo, Kartik Shah, Zhiyuan Ye, Richard O. Collins |
2023-10-10 |
$39,034,000 |
| 11649559 |
Method of utilizing a degassing chamber to reduce arsenic outgassing following deposition of arsenic-containing material on a substrate |
Xinyu BAO, Chun Yan, Hua Chung |
2023-05-16 |
$64,199,000 |
| 11649560 |
Method for forming silicon-phosphorous materials |
Errol Antonio C. Sanchez, Mark Saly, Abhishek Dube, Srividya Natarajan |
2023-05-16 |
$64,199,000 |
| 11643721 |
Low temperature deposition of iridium containing films |
Feng Q. Liu, Hua Chung, Mei Chang, Jeffrey W. Anthis, David Thompson |
2023-05-09 |
$42,400,000 |
| 11615986 |
Methods and apparatus for metal silicide deposition |
Xuebin Li, Wei Liu, Gaurav Thareja, Shashank Sharma, Patricia M. Liu |
2023-03-28 |
$69,791,000 |
| 11605544 |
Methods and systems for cleaning high aspect ratio structures |
Errol Antonio C. SANCHEZ |
2023-03-14 |
$86,512,000 |
| 11411039 |
Stacked pixel structure formed using epitaxy |
Papo CHEN, John Boland, Errol Antonio C. Sanchez, Stephen Moffatt |
2022-08-09 |
$67,965,000 |
| 11359972 |
Temperature calibration with band gap absorption method |
Zhepeng CONG, Nyi O. Myo |
2022-06-14 |
$21,647,000 |
| 11189508 |
Purged viewport for quartz dome in epitaxy reactor |
Ji-Dih HU, Brian H. Burrows, Janardhan Devrajan |
2021-11-30 |
$50,552,000 |
