Issued Patents All Time
Showing 26–50 of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171023 | Diode laser for wafer heating for EPI processes | Douglas E. Holmgren, Kartik Shah, Palamurali GAJENDRA, Nyi O. Myo, Preetham Rao +5 more | 2021-11-09 |
| 11164737 | Integrated epitaxy and preclean system | Lara Hawrylchak, Tushar Mandrekar, Errol C. Sanchez, Kin Pong Lo | 2021-11-02 |
| 11164767 | Integrated system for semiconductor process | Xinyu BAO, Hua Chung | 2021-11-02 |
| 11152221 | Methods and apparatus for metal silicide deposition | Xuebin Li, Wei Liu, Gaurav Thareja, Shashank Sharma, Patricia M. Liu | 2021-10-19 |
| 11124874 | Methods for depositing metallic iridium and iridium silicide | Hua Chung, Feng Q. Liu | 2021-09-21 |
| 11057963 | Lamp infrared radiation profile control by lamp filament design and positioning | Zhepeng CONG | 2021-07-06 |
| 11049719 | Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal | Lara Hawrylchak, Kin Pong Lo, Errol C. Sanchez, Tushar Mandrekar | 2021-06-29 |
| 11037838 | In-situ integrated chambers | Xuebin Li, Errol Antonio C. Sanchez, Patricia M. Liu, Gaurav Thareja, Raymond Hung | 2021-06-15 |
| 11021790 | Liner for processing chamber | Zhepeng CONG, Nyi O. Myo, Kartik Shah, Surajit Kumar | 2021-06-01 |
| 11021795 | Multi zone spot heating in epi | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2021-06-01 |
| 10930543 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2021-02-23 |
| 10770319 | EPI thickness tuning by pulse or profile spot heating | Shu-Kwan LAU, Zhiyuan Ye, Zuoming ZHU, Nyi O. Myo, Errol Antonio C. Sanchez | 2020-09-08 |
| 10731272 | Methods and apparatus for deposition processes | Nyi O. Myo, Kevin Joseph Bautista, Zhiyuan Ye, Yihwan Kim | 2020-08-04 |
| 10519547 | Susceptor design to eliminate deposition valleys in the wafer | Karthik Ramanathan, Kartik Shah, Nyi O. Myo, Jeffrey Tobin, Errol Antonio C. Sanchez +1 more | 2019-12-31 |
| 10504723 | Method and apparatus for selective epitaxy | Xuebin Li, Hua Chung, Flora Fong-Song CHANG, Abhishek Dube | 2019-12-10 |
| 10504717 | Integrated system and method for source/drain engineering | Chun YAN, Xinyu BAO, Melitta Hon, Hua Chung | 2019-12-10 |
| 10356848 | Lamp heating for process chamber | Mehmet Tugrul Samir | 2019-07-16 |
| 10332739 | UV radiation system and method for arsenic outgassing control in sub 7nm CMOS fabrication | Chun YAN, Xinyu BAO, Hua Chung | 2019-06-25 |
| 10312096 | Methods for titanium silicide formation using TiCl4 precursor and silicon-containing precursor | Hua Chung, Matthias Bauer, Satheesh Kuppurao | 2019-06-04 |
| 10276688 | Selective process for source and drain formation | Xinyu BAO, Zhiyuan Ye, Flora Fong-Song CHANG, Abhishek Dube, Xuebin Li +2 more | 2019-04-30 |
| 10269647 | Self-aligned EPI contact flow | Ying Zhang, Xinyu BAO, Regina Freed, Hua Chung | 2019-04-23 |
| 10269614 | Susceptor design to reduce edge thermal peak | Kartik Shah, Anhthu Ngo, Karthik Ramanathan, Nitin Pathak, Nyi O. Myo +8 more | 2019-04-23 |
| 10260164 | Methods and apparatus for deposition processes | Nyi O. Myo, Kevin Joseph Bautista, Zhiyuan Ye, Yihwan Kim | 2019-04-16 |
| 10224421 | Self-aligned process for sub-10nm fin formation | Zhiyuan Ye, Xinyu BAO, Chun Yan, Hua Chung, Satheesh Kuppurao | 2019-03-05 |
| 10199215 | Apparatus and method for selective deposition | Abhishek Dube, Jessica S. Kachian, David Thompson, Jeffrey W. Anthis | 2019-02-05 |