Patents per Year
Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG +10 more | 2024-12-10 | $69,596,000 |
| 12125698 | Integrated epitaxy and preclean system | Lara Hawrylchak, Schubert S. Chu, Tushar Mandrekar, Kin Pong Lo | 2024-10-22 | $83,950,000 |
| 11164737 | Integrated epitaxy and preclean system | Lara Hawrylchak, Schubert S. Chu, Tushar Mandrekar, Kin Pong Lo | 2021-11-02 | $95,673,000 |
| 11049719 | Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal | Lara Hawrylchak, Kin Pong Lo, Schubert S. Chu, Tushar Mandrekar | 2021-06-29 | $47,858,000 |
| 9245786 | Apparatus and methods for positioning a substrate using capacitive sensors | Blake Koelmel, Joseph M. Ranish | 2016-01-26 | $7,094,000 |