Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG +10 more | 2024-12-10 |
| 12125698 | Integrated epitaxy and preclean system | Lara Hawrylchak, Schubert S. Chu, Tushar Mandrekar, Kin Pong Lo | 2024-10-22 |
| 11164737 | Integrated epitaxy and preclean system | Lara Hawrylchak, Schubert S. Chu, Tushar Mandrekar, Kin Pong Lo | 2021-11-02 |
| 11049719 | Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal | Lara Hawrylchak, Kin Pong Lo, Schubert S. Chu, Tushar Mandrekar | 2021-06-29 |
| 9245786 | Apparatus and methods for positioning a substrate using capacitive sensors | Blake Koelmel, Joseph M. Ranish | 2016-01-26 |