| 12428731 |
Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability |
Ala Moradian, Shu-Kwan LAU, John Tolle, Manjunath Subbanna, Martin Jeffrey Salinas +3 more |
2025-09-30 |
| 12400904 |
Thermal processing susceptor |
Anhthu Ngo, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong, Anzhong Chang +10 more |
2025-08-26 |
| 12334341 |
Chamber body feedthrough for in chamber resistive heating element |
Brian H. Burrows, Ala Moradian, Chia Cheng Chin |
2025-06-17 |
| 12196617 |
Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber |
Shu-Kwan LAU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG, Maxim D. SHAPOSHNIKOV +10 more |
2025-01-14 |
| 12163229 |
Multi zone spot heating in EPI |
Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zhiyuan Ye, Joseph M. Ranish +3 more |
2024-12-10 |
| 12165934 |
Substrate processing monitoring |
Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG, Vilen K. NESTOROV +10 more |
2024-12-10 |
| 11860973 |
Method and system for foreline deposition diagnostics and control |
Ala Moradian, Martin A. Hilkene, Errol Antonio C. Sanchez, Bindusagar Marath Sankarathodi, Patricia M. Liu +1 more |
2024-01-02 |
| 11848226 |
Thermal processing susceptor |
Anhthu Ngo, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong, Anzhong Chang +10 more |
2023-12-19 |
| 11821088 |
Multi zone spot heating in EPI |
Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zhiyuan Ye, Joseph M. Ranish +3 more |
2023-11-21 |
| 11733081 |
Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system |
Bindusagar Marath Sankarathodi, Zhiyuan Ye, Jyothi RAJEEVAN, Ala Moradian, Errol Antonio C. Sanchez +1 more |
2023-08-22 |
| 11261538 |
In-situ temperature mapping for epi chamber |
Ala Moradian, Patricia M. Liu, Shu-Kwan LAU, Flora Fong-Song CHANG, Enle CHOO +1 more |
2022-03-01 |
| 11177144 |
Wafer spot heating with beam width modulation |
Shu-Kwan LAU, Zhiyuan Ye, Koji Nakanishi, Toshiyuki Nakagawa, Nyi O. Myo +1 more |
2021-11-16 |
| 11021795 |
Multi zone spot heating in epi |
Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zhiyuan Ye, Joseph M. Ranish +3 more |
2021-06-01 |
| 10930543 |
Thermal processing susceptor |
Anhthu Ngo, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong, Anzhong Chang +10 more |
2021-02-23 |
| 10770319 |
EPI thickness tuning by pulse or profile spot heating |
Shu-Kwan LAU, Zhiyuan Ye, Nyi O. Myo, Errol Antonio C. Sanchez, Schubert S. Chu |
2020-09-08 |
| 10062598 |
Thermal processing susceptor |
Anhthu Ngo, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong, Anzhong Chang +10 more |
2018-08-28 |
| 9842753 |
Absorbing lamphead face |
Paul Brillhart, Joseph M. Ranish, Satheesh Kuppurao, Balasubramanian Ramachandran |
2017-12-12 |
| 9768043 |
Quartz upper and lower domes |
Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir +9 more |
2017-09-19 |
| 9127360 |
Epitaxial chamber with cross flow |
Balasubramanian Ramachandran, Errol Antonio C. Sanchez, Nyi O. Myo, Kevin Joseph Bautista, Harpreet Singh Juneja |
2015-09-08 |
