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Multi zone spot heating in EPI |
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| 11821088 |
Multi zone spot heating in EPI |
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| 11594445 |
Support ring with plasma spray coating |
Jian Wu, Toshiyuki Nakagawa |
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| 11177144 |
Wafer spot heating with beam width modulation |
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2021-11-16 |
| 11021795 |
Multi zone spot heating in epi |
Shu-Kwan LAU, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye, Joseph M. Ranish +3 more |
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| 10373859 |
Support ring with masked edge |
Mehran Behdjat, Norman L. Tam, Aaron Muir Hunter, Joseph M. Ranish, Toshiyuki Nakagawa |
2019-08-06 |
| 10056286 |
Support ring with masked edge |
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2018-08-21 |
| 9842759 |
Support ring with masked edge |
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2017-12-12 |
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Support ring with masked edge |
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2016-05-03 |
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Semiconductor-manufacturing apparatus |
Yuji Maeda, Nobuo Tokai, Ichiro Kawai |
2008-07-01 |
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Gas mixing apparatus and method |
Chen-An Chen, Aihua Chen |
2001-10-16 |
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2000-05-30 |
