Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7393417 | Semiconductor-manufacturing apparatus | Yuji Maeda, Koji Nakanishi, Ichiro Kawai | 2008-07-01 |
| 6884464 | Methods for forming silicon comprising films using hexachlorodisilane in a single-wafer deposion chamber | Lee Luo, R. Suryanarayanan Iyer, Janardhanan Anand Subramony, Errol Antonio C. Sanchez, Xiaoliang Jin +4 more | 2005-04-26 |
| 6566199 | Method and system for forming film, semiconductor device and fabrication method thereof | Yuji Maeda, Masayuki Hashimoto | 2003-05-20 |