Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9892941 | Multi-zone resistive heater | Anqing Cui, Binh Tran, Alexander Tam, Jacob Smith, Joseph Yudovsky +1 more | 2018-02-13 |
| 7601652 | Method for treating substrates and films with photoexcitation | Kaushal K. Singh, Sean M. Seutter, Jacob Smith, Steve Ghanayem, Adam Brailove +2 more | 2009-10-13 |
| 7488690 | Silicon nitride film with stress control | Andrew Lam, Yuji Maeda, Thomas C. Mele, Jacob Smith, Sean M. Seutter +3 more | 2009-02-10 |
| 7473655 | Method for silicon based dielectric chemical vapor deposition | Yaxin Wang, Yuji Maeda, Thomas C. Mele, Sean M. Seutter, Sanjeev Tandon | 2009-01-06 |
| 7465669 | Method of fabricating a silicon nitride stack | Sanjeev Tandon, Kangzhan Zhang, Rubi Lapena, Yuji Maeda | 2008-12-16 |
| 7416995 | Method for fabricating controlled stress silicon nitride films | Sanjeev Tandon, Jacob Smith | 2008-08-26 |
| 7365029 | Method for silicon nitride chemical vapor deposition | Sean M. Seutter, Sanjeev Tandon, Errol Antonio C. Sanchez, Shulin Wang | 2008-04-29 |
| 7341907 | Single wafer thermal CVD processes for hemispherical grained silicon and nano-crystalline grain-sized polysilicon | Ming Li, Kevin Cunningham, Sheeba J. Panayil, Guangcai Xing | 2008-03-11 |
| 7294581 | Method for fabricating silicon nitride spacer structures | Sanjeev Tandon | 2007-11-13 |
| 6884464 | Methods for forming silicon comprising films using hexachlorodisilane in a single-wafer deposion chamber | Lee Luo, Janardhanan Anand Subramony, Errol Antonio C. Sanchez, Xiaoliang Jin, Aihua Chen +4 more | 2005-04-26 |