Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8329557 | Techniques for forming thin films by implantation with reduced channeling | Zuqin Liu, Francois J. Henley, Albert Lamm | 2012-12-11 |
| 8330126 | Race track configuration and method for wafering silicon solar substrates | Francois J. Henley | 2012-12-11 |
| 8089055 | Ion beam processing apparatus | — | 2012-01-03 |
| 7976629 | Crystal film fabrication | — | 2011-07-12 |
| 7833351 | Batch processing platform for ALD and CVD | Aaron P. Webb, Joseph Yudovsky, Nir Merry, Andrew J. Constant, Efrain Quiles +3 more | 2010-11-16 |
| 7601652 | Method for treating substrates and films with photoexcitation | Kaushal K. Singh, Sean M. Seutter, Jacob Smith, R. Suryanarayanan Iyer, Steve Ghanayem +2 more | 2009-10-13 |
| 6855906 | Induction plasma reactor | — | 2005-02-15 |
| 6803590 | Ion beam mass separation filter, mass separation method thereof and ion source using the same | Hirohiko Murata | 2004-10-12 |
| 6294862 | Multi-cusp ion source | Matthew C. Gwinn | 2001-09-25 |
| 6060718 | Ion source having wide output current operating range | Masateru Sato | 2000-05-09 |
| 6025602 | Ion implantation system for implanting workpieces | Peter Rose, Julian G. Blake, Zhongmin Yang, Richard F. McRay, Barbara J. Hughey | 2000-02-15 |
| 6016036 | Magnetic filter for ion source | — | 2000-01-18 |
| 5828070 | System and method for cooling workpieces processed by an ion implantation system | Peter Rose, Julian G. Blake, Zhongmin Yang, Kenneth H. Purser | 1998-10-27 |
| 5825038 | Large area uniform ion beam formation | Julian G. Blake, Kenneth H. Purser, Peter Rose, Barbara J. Hughey | 1998-10-20 |
| 5811823 | Control mechanisms for dosimetry control in ion implantation systems | Julian G. Blake, Piero Sferlazzo, Peter Rose | 1998-09-22 |
| 5793050 | Ion implantation system for implanting workpieces | Peter Rose, Julian G. Blake, Zhongmin Yang, Richard F. McRay, Barbara J. Hughey | 1998-08-11 |
| 5751003 | Loadlock assembly for an ion implantation system | Peter Rose | 1998-05-12 |
| 4997608 | Molding polytetrafluoroethylene | Charles W. Haldeman | 1991-03-05 |