Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9029811 | Apparatus to control an ion beam | Christopher Campbell, Frank Sinclair, Robert C. Lindberg, Joseph C. Olson | 2015-05-12 |
| 8993980 | Dual stage scanner for ion beam control | Christopher Campbell, Frank Sinclair, Robert C. Lindberg, Joseph C. Olson | 2015-03-31 |
| 8884244 | Dual mode ion implanter | Christopher Campbell, Frank Sinclair, Robert C. Lindberg, Joseph C. Olson | 2014-11-11 |
| 8466431 | Techniques for improving extracted ion beam quality using high-transparency electrodes | James S. Buff, Svetlana B. Radovanov, Bon-Woong Koo, Wilhelm P. Platow, Frank Sinclair +7 more | 2013-06-18 |
| 8309935 | End terminations for electrodes used in ion implantation systems | Frank Sinclair, Svetlana B. Radovanov | 2012-11-13 |
| 8101488 | Hydrogen implantation with reduced radiation | Theodore H. Smick, Steven Richards, Geoffrey Ryding | 2012-01-24 |
| 8089050 | Method and apparatus for modifying a ribbon-shaped ion beam | William H. Park | 2012-01-03 |
| 8058626 | Method and apparatus for modifying a ribbon-shaped ion beam | William H. Park | 2011-11-15 |
| 8044374 | Ion implantation apparatus | Geoffrey Ryding, Theodore H. Smick, Hilton F. Glavish, Joeph Daniel Gillespie | 2011-10-25 |
| 7989784 | Ion implantation apparatus and a method | Hilton F. Glavish, Geoffrey Ryding, Theodore H. Smick | 2011-08-02 |
| 7982197 | Ion implantation apparatus and a method for fluid cooling | Theodore H. Smick, Geoffrey Ryding, Joseph Gillespie | 2011-07-19 |
| 7897943 | Controlling the characteristics of implanter ion-beams | Harald A. Enge, Norman L. Turner | 2011-03-01 |
| 7888660 | Controlling the characteristics of implanter ion-beams | Harald A. Enge, Norman L. Turner | 2011-02-15 |
| 7829866 | Broad energy-range ribbon ion beam collimation using a variable-gradient dipole | Norman L. Turner | 2010-11-09 |
| 7807983 | Technique for reducing magnetic fields at an implant location | James S. Buff, Victor M. Benveniste | 2010-10-05 |
| 7675047 | Technique for shaping a ribbon-shaped ion beam | Svetlana B. Radovanov, Peter L. Kellerman, Victor M. Benveniste, Robert C. Lindberg, Tyler Rockwell +2 more | 2010-03-09 |
| 7525103 | Technique for improving uniformity of a ribbon beam | Atul Gupta | 2009-04-28 |
| 7439526 | Beam neutralization in low-energy high-current ribbon-beam implanters | Norman L. Turner | 2008-10-21 |
| 7414249 | Broad energy-range ribbon ion beam collimation using a variable-gradient dipole | Norman L. Turner | 2008-08-19 |
| 7365340 | Resonance method for production of intense low-impurity ion beams of atoms and molecules | Albert E. Litherland, Norman L. Turner | 2008-04-29 |
| 7351984 | Controlling the characteristics of implanter ion-beams | Harald A. Enge, Norman L. Turner | 2008-04-01 |
| 7301156 | Controlling the characteristics of implanter ion-beams | Harald A. Enge, Norman L. Turner | 2007-11-27 |
| 6933507 | Controlling the characteristics of implanter ion-beams | Harald A. Enge, Norman L. Turner | 2005-08-23 |
| 5907158 | Broad range ion implanter | Mehran Nasser-Ghodsi, Andrew B. Wittkower, Hilton F. Glavish, Gaylord C. Noblitt, III | 1999-05-25 |
| 5828070 | System and method for cooling workpieces processed by an ion implantation system | Adam Brailove, Peter Rose, Julian G. Blake, Zhongmin Yang | 1998-10-27 |