Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11553584 | Method and system for surface modification of substrate for ion beam target | William H. Park, Mark Lambert, Noah Smick, Takao Sakase | 2023-01-10 |
| 10462893 | Method and system for surface modification of substrate for ion beam target | William H. Park, Mark Lambert, Noah Smick, Takao Sakase | 2019-10-29 |
| 9036326 | Gas bearing electrostatic chuck | William D. Lee, Marvin R. LaFontaine, Ashwin M. Purohit, Donovan Beckel, Teng-Chao David Tao +2 more | 2015-05-19 |
| 8759803 | Ion implant apparatus and a method of implanting ions | Theodore H. Smick, Geoffrey Ryding, Hilton F. Glavish, Takao Sakase, William H. Park +3 more | 2014-06-24 |
| 8633458 | Ion implant apparatus and a method of implanting ions | Theodore H. Smick, Geoffrey Ryding, Hilton F. Glavish, Takao Sakase, William H. Park +3 more | 2014-01-21 |
| 8435804 | Method and apparatus for forming a thin lamina | Adam Kell, Robert Clark-Phelps, Gopal Prabhu, Takao Sakase, Theodore H. Smick +2 more | 2013-05-07 |
| 8426829 | Ion implantation apparatus | William Leavitt, Theodore H. Smick, William H. Park, Paul Eide, Drew Arnold +1 more | 2013-04-23 |
| 8378317 | Ion implant apparatus and method of ion implantation | Theodore H. Smick, Geoffrey Ryding, Takao Sakase, William H. Park, Ronald Horner +1 more | 2013-02-19 |
| 8324599 | Ion implantation apparatus | Theodore H. Smick | 2012-12-04 |
| 8268645 | Method and apparatus for forming a thin lamina | Adam Kell, Robert Clark-Phelps, Gopal Prabhu, Takao Sakase, Theodore H. Smick +2 more | 2012-09-18 |
| 8226142 | Workpiece gripping integrity sensor | Sor Kham, Robert E. Wayne | 2012-07-24 |
| 7982197 | Ion implantation apparatus and a method for fluid cooling | Theodore H. Smick, Geoffrey Ryding, Kenneth H. Purser | 2011-07-19 |
| 7789443 | Workpiece gripping device | Alexander H. Slocum, Allan D. Weed | 2010-09-07 |
| 5014841 | Clutch adjustment and lockup system | — | 1991-05-14 |