Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10580616 | System and method for in-situ beamline film stabilization or removal in the AEF region | David A. Kirkwood | 2020-03-03 |
| 9036326 | Gas bearing electrostatic chuck | William D. Lee, Marvin R. LaFontaine, Ashwin M. Purohit, Joseph Gillespie, Donovan Beckel +2 more | 2015-05-19 |
| 8422193 | Annulus clamping and backside gas cooled electrostatic chuck | William D. Lee, Marvin R. LaFontaine, Ashwin M. Purohit | 2013-04-16 |
| 7629597 | Deposition reduction system for an ion implanter | Philip J. Ring | 2009-12-08 |