DK

David A. Kirkwood

AT Axcelis Technologies: 2 patents #105 of 300Top 35%
📍 Arlington, MA: #1,135 of 2,056 inventorsTop 60%
🗺 Massachusetts: #42,150 of 88,656 inventorsTop 50%
Overall (All Time): #1,900,820 of 4,157,543Top 50%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10689752 Film stabilization through novel materials modification of beamline components Joseph Valinski 2020-06-23
10580616 System and method for in-situ beamline film stabilization or removal in the AEF region Teng-Chao David Tao 2020-03-03