Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9934928 | Source housing assembly for controlling ion beam extraction stability and ion beam current | Shengwu Chang, Jeff Burgess, Michael St Peter, Matt Mosher, Joe Olson +1 more | 2018-04-03 |
| 9679745 | Controlling an ion beam in a wide beam current operation range | Shengwu Chang, Kristen Rounds, Daniel V. Brosnan | 2017-06-13 |
| 9396903 | Apparatus and method to control ion beam current | Shengwu Chang, Kristen Rounds, Michael St. Peter | 2016-07-19 |
| 8426829 | Ion implantation apparatus | Theodore H. Smick, Joseph Gillespie, William H. Park, Paul Eide, Drew Arnold +1 more | 2013-04-23 |
| 6744017 | Wafer heating devices for use in ion implantation systems | Christopher W. Berry, Thomas A. Doyon, David Sabo | 2004-06-01 |
| 6114705 | System for correcting eccentricity and rotational error of a workpiece | David S. Holbrook | 2000-09-05 |