SC

Shengwu Chang

VA Varian Semiconductor Equipment Associates: 26 patents #22 of 513Top 5%
Applied Materials: 8 patents #1,541 of 7,310Top 25%
🗺 Massachusetts: #2,507 of 88,656 inventorsTop 3%
Overall (All Time): #102,487 of 4,157,543Top 3%
34
Patents All Time

Issued Patents All Time

Showing 1–25 of 34 patents

Patent #TitleCo-InventorsDate
11232925 System and method for improved beam current from an ion source Frank Sinclair, Michael St. Peter 2022-01-25
11120966 System and method for improved beam current from an ion source Frank Sinclair, Michael St. Peter 2021-09-14
11011343 High-current ion implanter and method for controlling ion beam using high-current ion implanter Alexandre Likhanskii, Frank Sinclair, Antonella Cucchetti, Eric D. Hermanson, Christopher Campbell 2021-05-18
10937624 Apparatus and method for controlling ion beam using electrostatic filter Alexandre Likhanskii, Frank Sinclair 2021-03-02
10886098 Electrostatic filter and ion implanter having asymmetric electrostatic configuration Alexandre Likhanskii, Frank Sinclair, Eric D. Hermanson, Nevin H. Clay 2021-01-05
10804068 Electostatic filter and method for controlling ion beam properties using electrostatic filter Alexandre Likhanskii, Frank Sinclair 2020-10-13
10790116 Electostatic filter and method for controlling ion beam using electostatic filter Alexandre Likhanskii, Frank Sinclair 2020-09-29
10714301 Conductive beam optics for reducing particles in ion implanter Frank Sinclair, Alexandre Likhanskii, Christopher Campbell, Robert C. Lindberg 2020-07-14
10665415 Apparatus and method for controlling ion beam properties using electrostatic filter Alexandre Likhanskii, Frank Sinclair 2020-05-26
10504682 Conductive beam optic containing internal heating element Frank Sinclair, Alexandre Likhanskii, Christopher Campbell, Robert C. Lindberg, Eric D. Hermanson 2019-12-10
10468224 Apparatus and method for controlling ion beam properties using energy filter Svetlana B. Radovanov, Ana Samolov, Frank Sinclair, Peter L. Kellerman 2019-11-05
10074514 Apparatus and method for improved ion beam current Frank Sinclair, Alexandre Likhanskii, Philip Layne 2018-09-11
9934928 Source housing assembly for controlling ion beam extraction stability and ion beam current Jeff Burgess, William Leavitt, Michael St Peter, Matt Mosher, Joe Olson +1 more 2018-04-03
9679745 Controlling an ion beam in a wide beam current operation range Kristen Rounds, William Leavitt, Daniel V. Brosnan 2017-06-13
9520204 Cold stripper for high energy ion implanter with tandem accelerator 2016-12-13
9437341 Method and apparatus for generating high current negative hydrogen ion beam 2016-09-06
9396903 Apparatus and method to control ion beam current Kristen Rounds, William Leavitt, Michael St. Peter 2016-07-19
9281165 Bias electrodes for tandem accelerator Christopher Lupoli, William Davis Lee, Frank Sinclair, James Alan Pixley 2016-03-08
9263231 Moveable current sensor for increasing ion beam utilization during ion implantation 2016-02-16
9165744 Apparatus for treating ion beam 2015-10-20
9012337 Platen control Joseph C. Olson, Frank Sinclair, Matthew P. McClellan, Antonella Cucchetti 2015-04-21
9006692 Apparatus and techniques for controlling ion implantation uniformity Stanislav S. Todorov, George M. Gammel, Richard Allen Sprenkle, Norman E. Hussey, Frank Sinclair +3 more 2015-04-14
8853653 Apparatus and techniques for controlling ion implantation uniformity Stanislav S. Todorov, George M. Gammel, Richard Allen Sprenkle, Norman E. Hussey, Frank Sinclair +3 more 2014-10-07
8664619 Hybrid electrostatic lens for improved beam transmission 2014-03-04
8330125 Ion beam tuning Joseph C. Olson, Frank Sinclair, Matthew P. McClellan 2012-12-11