SC

Shengwu Chang

VA Varian Semiconductor Equipment Associates: 26 patents #22 of 513Top 5%
Applied Materials: 8 patents #1,541 of 7,310Top 25%
🗺 Massachusetts: #2,507 of 88,656 inventorsTop 3%
Overall (All Time): #102,487 of 4,157,543Top 3%
34
Patents All Time

Issued Patents All Time

Showing 26–34 of 34 patents

Patent #TitleCo-InventorsDate
7622724 High voltage insulator for preventing instability in an ion implanter due to triple-junction breakdown Frank Sinclair 2009-11-24
7462844 Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation Isao Tsunoda, Nobihiro Tokoro, Dennis Rodier, Joseph C. Olson, Donna L. Smatlak +2 more 2008-12-09
7459692 Electron confinement inside magnet of ion implanter Anthony Renau, Joseph C. Olson, James S. Buff 2008-12-02
7442944 Ion beam implant current, spot width and position tuning Antonella Cucchetti, Joseph P. Dzengeleski, Gregory Gibilaro, Rosario Mollica, Gregg Norris +2 more 2008-10-28
7397047 Technique for tuning an ion implanter system Joseph C. Olson, Damian Brennan 2008-07-08
7355188 Technique for uniformity tuning in an ion implanter system Joseph C. Olson, Jonathan Gerald England, Morgan Evans, Douglas Thomas Fielder, Gregg Norris +2 more 2008-04-08
7253423 Technique for uniformity tuning in an ion implanter system Joseph C. Olson, Damian Brennan 2007-08-07
7138768 Indirectly heated cathode ion source Peter E. Maciejowski, Joseph C. Olson, Bjorn O. Pedersen, Leo V. Klos, Daniel Distaso +1 more 2006-11-21
7045799 Weakening focusing effect of acceleration-deceleration column of ion implanter Joseph C. Olson, Donald F. Anderson, Daniel McGillicuddy 2006-05-16